Gas Sensor Based on MEMS Technology

李珂,于世洁,尤政,赵嘉昊

DOI: https://doi.org/10.3969/j.issn.1000-9787.2008.11.002

2008-01-01

Abstract:The principles of gas sensors based on MEMS technology at home and abroad are summarized,which include resonate micro cantilever,SAW,conductor detect,photoacoustic spectroscopy,gas spectrum,catalytic combustion and FAIMS.The characteristics of all kinds of sensor are compared.

What problem does this paper attempt to address?

The Research on the Gas Sensor Based on LAPS and Nanometer Porous Silicon

ZONG Xiao-lin,CAI Hua,YU Hui,WANG Ping

DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.219

2006-01-01

Abstract:A new kind of sensor for gas test based on the method of light addressable potentiometric sensor(LAPS) and porous silicon technique is developed. Combined with the MicroElectro Mechanical System (MEMS) techniques for the LAPS fabrication and the characteristics of this kind of planar apparatus, a new way for the detection of gases released during the metabolism of cells is attainable. From some primary results, it is shown that, the sensor had relatively evident response to alcohol gas under the room temperature, along with some concentration gradient characteristics. The feasibility of the design of this kind of sensor is proved.
The Optimal Design and Application QCM Gas Sensor

徐良,余皓,王平

DOI: https://doi.org/10.3969/j.issn.1004-1699.2002.01.018

2002-01-01

Abstract:This paper is mainly introduce a novel gas sensor QCM (Quartz Crystal Microbalance), which has the characteristics of high sensitivity, high stability, and strong anti jamming ability. And it can be used in many fields. We study on the law of QCM responding to expiratory gases. Using a computational chemistry method, we can easily design sensitive film of sensor, and make it by the electropolymerization theory. We also design a measurement systems and use a IEEE488 card to connect measurement equipment. And we get the response data of expiratory gases from the QCM gas sensor. So we have the conclusion that the QCM gas sensor can be used in measuring acetone gas in breath.
Progress on Micro Cantilever Resonant Gas Sensors

高伟,董瑛,尤政

DOI: https://doi.org/10.3969/j.issn.1000-9787.2008.11.001

2008-01-01

Abstract:Micro mechanical resonant sensor is a research focus in MEMS field.The theoretical basis of micro cantilever resonant gas sensor is discussed and the key technologies and general methods of cantilever surface functionalization are introduced.The research status of micro cantilever resonant gas sensor and the research progress in the latest five years are provided.The future development trend and application prospect are forecasted.
The Development Of Several Normal Gas Sensors

李冬梅,黄元庆,张佳平,张鑫,辜克兢

DOI: https://doi.org/10.3969/j.issn.1006-883X.2006.01.001

2006-01-01

Abstract:With the development of the gas sensor, more and more applications are implemented, especially in testing the environment quality and the industry’s safety production, even people’s life. The gas sensors’ working principles including the new development of several normal poisonous gases and flammable gases will be introduced. A novel production technics-MEMS which is applied to fabricate the gas sensor will also be mentioned.
Gas Detection Microsystem With MEMS Gas Sensor and Integrated Circuit

Jin Wang,Jiaqi Yang,Dongliang Chen,Lele Jin,Yu Li,Yidan Zhang,Lei Xu,Youmin Guo,Fujiang Lin,Feng Wu

DOI: https://doi.org/10.1109/JSEN.2018.2829742

IF: 4.3

2018-01-01

IEEE Sensors Journal

Abstract:In this paper, a gas detection microsystem which consists of a highly sensitive micro-electro mechanical systems (MEMS) gas sensor and a CMOS integrated circuit, including a read-out circuit, data processing circuit, and an interface circuit is presented. The integrated microsystem whose area is less than 3 mm2 can work with only power supply due to the integration and flexibility. By packing the ...
MEMS-based Sensing Technology for the Gas Chromatograph Analysis

Zilan He,Qingsha Hang,Baiquan Chen,Bangfa Chen,Sixiang Chen

DOI: https://doi.org/10.1088/1742-6596/2479/1/012003

2023-04-25

Journal of Physics: Conference Series

Abstract:Device miniaturization based on MEMS technology is an important research direction in the field of MEMS. The gas chromatograph is a commonly used instrument for detecting complex gases, but due to its large size, high power consumption, and heavyweight, it is not convenient and cannot meet people's needs for real-time, online, and rapid access to information. Therefore, the miniaturization of gas chromatographs combined with MEMS technology is a research trend. This paper first introduces the basic structure of the gas chromatograph. Then it studies the miniaturization of columns, detector miniaturization, and flow meter miniaturization based on MEMS technology, combined with cross-micro-nano scale integration technology to further improve sensitivity, and summarizes the prospects.
A review of MEMS-based metal oxide semiconductors gas sensor in Mainland China

Gaoqiang Niu,Fei Wang

DOI: https://doi.org/10.1088/1361-6439/ac5b98

2022-03-08

Journal of Micromechanics and Microengineering

Abstract:Abstract With the growing demand for gas monitoring in various fields as the fast development of the Internet of Things (IoT), metal oxide semiconductors (MOSs) gas sensors based on the advanced microelectromechanical systems (MEMS) technology have achieved great developments in the past decades, especially in mainland China. This review summarizes the development of MEMS-based MOSs gas sensors in terms of the MEMS micro-hotplate, wafer-scale deposition and patterning methods for MOS materials, and several latest applications. Various designs of the micro-hotplates have been proposed, particularly, the suspended membrane type with low power consumption. By combining the “bottom up” and the “top down” strategies, MEMS provides a promising solution for wafer-scale fabrication process of MOSs based gas sensors, which have been successfully applied for the detection of ethanol, H2, H2S, toluene, HCHO, Freon etc. With the diversiform nano-structures of MOSs and emerging machine learning algorithm, great progress has been made recently on the aspects of the sensing performance, pulse heating and intelligent sensing systems.

engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
A Wide-Range and High-Resolution Detection Circuit for MEMS Gas Sensor

Minqiang Chen,Shufeng Peng,Ningcheng Wang,Lei Xu,Fujiang Lin,Feng Wu

DOI: https://doi.org/10.1109/JSEN.2018.2888557

IF: 4.3

2019-01-01

IEEE Sensors Journal

Abstract:In this paper, a gas detection circuit for MEMS gas sensor is presented, which has a wide measurement range and high resolution to fulfill an MEMS gas sensor. The circuit has been designed in a 0.18- <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula> complementary metal–oxide–semiconductor technology with a 1.8-V power supply based on resistance-to-frequency technology and occupies an area of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$0.83\times 1.2$ </tex-math></inline-formula> mm 2 . Experimental results show that the chip achieves a resistance measurement range almost over 8.5 decades ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$1~\Omega $ </tex-math></inline-formula> –500 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\text{M}\Omega $ </tex-math></inline-formula> ) corresponded to the output frequency range from 4.11 MHz to 145 Hz which can greatly meet the performance of the MEMS gas sensor. By combining the chip with the MEMS gas sensor, the system can accurately detect various gases, including hydrogen (H 2 ), ammonia (NH 3 ), and alcohol (C 2 H 5 OH), even at low concentration (<0.4 ppm), and the output frequency has a very good linear relationship with the gas concentration.
A Smart Resonating Micro-Cantilever in MEMS Gas Sensor: Improved Design

Jia Hao Zhao,Shi Jie Yu,Ke Li,Qin Zhou,Zheng You

DOI: https://doi.org/10.1117/12.810579

2008-01-01

Abstract:A smart micro-cantilever in a creative gas sensor with high sensitivity is presented. The resonance frequency shifting of the cantilever is monitored to detect its mass change caused by adsorption of certain gas molecules. The cantilever has a more compact MEMS structure and the smart functions because of the sensor with a self-actuating and detecting (SAD) vibration system, which is integration of a vibration actuating system and a detecting system. The model of the smart beam is analyzed by computer simulation. Design rules of the beam are obtained according to related discuss with function goal of extremely rare gas detection. After fabrication and test of the smart cantilever, an improved solution of the smart cantilever is introduced by comparison study of the computer simulation and experiment results of the fabricated beam.
MEMS Gas Sensors: A Review

Muhammad Izzudin Ahmad Asri,Nazibul Hasan,Mariatul Rawdhah Ahmad Fuaad,Yusri Md. Yunos,Mohamed Sultan Mohamed Ali,Md. Nazibul Hasan

DOI: https://doi.org/10.1109/jsen.2021.3091854

IF: 4.3

2021-09-01

IEEE Sensors Journal

Abstract:Micro-electromechanical system (MEMS) gas sensors represent a system that is capable of detecting the existence and concentration of gasses in the atmosphere. These sensors have become incredibly popular and have been widely used in a variety of fields, including the biomedical field. Over the years, several gas sensors have been developed to detect and analyze a wide range of gases. As sensor applications are expected to be further extended in the near future, it is, therefore, essential to review crucial types of gas sensors, their features, challenges, and a range of important applications. This paper presents a comprehensive review of the state-of-the-art gas sensors, which have been developed for gas sensing applications using MEMS technology. The working principle, the structure, the sensitive material and the important characteristics of each of these sensors are discussed. The focus of this review is on applications surrounding the use of electrochemical, optical and acoustic gas sensors for biomedical applications.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
The bottleneck and innovation key of MEMS-based metal oxide semiconductors gas sensor for petrochemical industry

Yuxin Zhao

DOI: https://doi.org/10.1016/j.cej.2024.151431

IF: 15.1

2024-04-24

Chemical Engineering Journal

Abstract:The surge in Internet of Things demands propels advancements in gas sensor technology, with MEMS-based semiconductor sensors standing out for petrochemical monitoring due to their ideal balance of cost, size, and performance. These sensors employ nanostructured materials, enabling features like compact design, significant data capture with minimal power usage, and the potential for enhanced electronic properties through structural synergies. Despite their growing deployment for detecting hazardous gases, challenges in material selection and hardware engineering impede broader application. The vast diversity of sensing materials necessitates efficient selection methods beyond traditional trial-and-error, critical for achieving desired sensor performance. Key issues also include the energy consumption of miniaturized chips with microheaters, and the complexity of precisely controlling material placement at the micro- and nanoscale. These challenges result in variable sensor responses and reliability concerns, highlighting the need for innovative solutions to unlock the full potential of MEMS gas sensors in the petrochemical industry.

engineering, chemical, environmental
MEMS Based H2 Gas Sensors

P. Chen,I. Chen,J. Neuner

Abstract:INTRODUCTION Hydrogen is currently expected to join electricity and fossil fuels as a primary energy carrier in the 21 century. Significant R&D efforts are currently directed toward creating the basic building blocks of such an H2 economy: production, storage, transport and utilization. A common need of these building blocks is the ability to detect and quantify the amount of H2 gas present. This is required for health and safety reasons, as well as for monitoring H2 based processes, e.g. H2 fueled automobiles would require sensors to detect gas leaks, as well as to monitor and regulate the air/H2 mixture. An effective H2 detection and monitoring system requires a sensor element that functions in a variety of challenging environments. It needs to be selective to H2 in a range of atmospheres, including the O2-rich highhumidity environments found in fuel cells, as well as in O2 depleted atmospheres. Speed of detection is a critical requirement for rapid response to potentially hazardous leaks. Low power consumption is requisite for use in portable instrumentation and personnel monitoring devices. Ultimately, these must be achieved by an element that is safe and economical. This paper reports on progress in developing MEMS (Micro-Electro-Mechanical Systems) based H2 gas sensors. These sensors couple novel thin films as the active layer with a MEMS structure known as a MicroHotplate. This coupling has resulted in a H2 gas sensor that has several unique advantages in terms of speed, sensitivity, and amenability to manufacturing.

Materials Science,Environmental Science,Engineering
Trace Gas Sensor Based on Mems Cantilever Resonator

Dong Ying,Gao Wei,You Zheng

DOI: https://doi.org/10.4028/www.scientific.net/amr.383-390.3115

2011-01-01

Advanced Materials Research

Abstract:A chemical gas sensor for volatile organic compounds (VOCs) detection at trace level is proposed. In this paper, the development and demonstration of the sensor prototype are presented. The prototype is based on a microcantilever resonator that is fabricated from direct bonding silicon-on-insulator (SOI) wafer. The resonant cantilever employs integrated thermal driving and piezoresistive detecting units, and operates in a self-oscillation system. Polyethylenevinylacetate (PEVA) is deposited on top of the cantilever as gas sensitive layer through a spraying method. The responses of the prototype to relative humidity (RH) and six common VOCs: toluene, benzene, ethanol, acetone, hexane and octane have been tested. The PEVA-coated prototype has trace sensitivity to toluene, benzene, hexane and octane, while is insensitive to humidity. The experimental results provide confirmation that the microcantilever resonator is an excellent platform for chemical gas sensor.
Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach

Haotian Liu,Li Zhang,Ho Holden Li,Ooi Kiang Tan,King Li,Ooi Tan

DOI: https://doi.org/10.3390/mi9110557

IF: 3.4

2018-10-29

Micromachines

Abstract:The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their balance in performance and cost. Integrating sensors with signal conditioning circuits on a single chip can significantly reduce the noise and package size. However, the fabrication process of MEMS sensors must be compatible with the complementary metal oxide semiconductor (CMOS) circuits, which imposes restrictions on the materials and design. In this paper, the sensing mechanism, design and operation of these sensors are reviewed, with focuses on the approaches towards performance improvement and CMOS compatibility.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Thermally-Excited MEMS Cantilever Resonator for Gas Sensing

董瑛,高伟,尤政

DOI: https://doi.org/10.3969/j.issn.1672-6030.2009.02.006

2009-01-01

Nanotechnology and Precision Engineering

Abstract:An electro-thermal excitation/piezoresistive detection resonator was designed for gas concentration through the measurement of the polymer-coated cantilever's resonant frequency shift due to the mass change caused by specific chemical reaction or physical absorption of gas molecules. The cantilever resonator was fabricated through bulk silicon process on silicon-on-insulator (SOI) wafer and with ICP etching method. In this paper, the simulation of the bending, stress, and temperature distribution of the cantilever was carried out with finite element analysis (FEA). The results show that the proposed cantilever provides more favorable temperature distribution for the gas sensing material than the commonly used configuration. The frequency response of the cantilever resonator at different levels of excitation was discussed theoretically and experimentally. Relatively high resonant frequency and quality factor, and a linear relationship between excitation power and resonant amplitude were demonstrated.
Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid

Hao Jia,Pengcheng Xu,Xinxin Li

DOI: https://doi.org/10.3390/mi12060645

2021-05-31

Abstract:Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components, exhibit exquisite gravimetric sensitivities which have greatly advanced the bio/chemical sensor technologies in the past two decades. This paper reviews the development of integrated MEMS/NEMS resonators for bio/chemical sensing applications mainly in air and liquid. Different vibrational modes (bending, torsional, in-plane, and extensional modes) have been exploited to enhance the quality (Q) factors and mass sensing performance in viscous media. Such resonant mass sensors have shown great potential in detecting many kinds of trace analytes in gas and liquid phases, such as chemical vapors, volatile organic compounds, pollutant gases, bacteria, biomarkers, and DNA. The integrated MEMS/NEMS mass sensors will continuously push the detection limit of trace bio/chemical molecules and bring a better understanding of gas/nanomaterial interaction and molecular binding mechanisms.
Advances in sensing mechanisms and micro/nanostructured sensing layers for surface acoustic wave-based gas sensors

Xue Li,Wenfeng Sun,Wei Fu,Xiaotao Zu,Yuanjun Guo,HF Lu,Desmond Gibson,Yong Qing Fu

DOI: https://doi.org/10.1039/d2ta10014b

IF: 11.9

2023-04-15

Journal of Materials Chemistry A

Abstract:Surface acoustic wave (SAW) technology has been extensively used in communications and sensing applications. For SAW based gas sensing applications, the sensitive material or sensing layer which is coated onto the SAW sensor is vital for its sensitivity, selectivity, limit of detection, and repeatability, as changes of sensing signals (including frequency, amplitude, and phase angle) are strongly linked to variations of mass loading, electrical conductivity and elastic modulus (or elastic loading) of this sensing layer. There have been rapid developments in this field recently but great challenges still remain in the choices of suitable sensing materials, structures and mechanisms of these sensing layers. This paper reviews recent advances of micro- and nanostructured sensing materials and their selection, their sensing mechanisms and designs towards enhancing the gas sensing performance of SAW devices. We first discuss different sensing mechanisms based on SAW principles, along with the key sensing influencing parameters. We then highlight and categorize recently reported gas sensing materials into semiconductor metal oxides, carbon-based materials and polymers. We further focus the discussion on the relationships among the micro/nanostructures, compositions, and structure-sensing performance of the SAW based sensors. Finally, we highlight key challenges and potential solutions as well as future directions of sensing materials for SAW based gas sensors.

materials science, multidisciplinary,chemistry, physical,energy & fuels
Integrated sensor based on acoustics-electricity-mechanics coupling effect for wireless passive gas detection

Licheng Zhou,Bohui Zhai,Zhixiang Hu,Mingqi Zhang,Long Li,Xiangxin Wang,Guangzu Zhang,Jingting Luo,Honglang Li,Bingbing Chen,Shenglin Jiang,Hua-Yao Li,Huan Liu

DOI: https://doi.org/10.1007/s12274-022-4892-3

IF: 9.9

2022-08-26

Nano Research

Abstract:Integrated sensor combines multiple sensor functions into a single unit, which has the advantages of miniaturization and better application potential. However, limited by the sensing platforms of the sensor and the selectivity of the sensitive film, there are still challenges to realize multi-component gas detection in one unit. Herein, a principle integration method is proposed to achieve the multi-component gas detection based on the acoustics-electricity-mechanics coupling effect. The electrical and mechanical properties of the Bi2S3 nanobelts materials in different atmospheres indicate the possibility of realizing the principle integration. At the same time, the surface acoustic wave (SAW) sensor as a multivariable physical transducer can sense both electrical and mechanical properties. Upon exposure to 10 ppm NO2, NH3, and their mixtures, the integrated SAW gas sensor shows a 4.5 kHz positive frequency shift (acoustoelectric effect), an 11 kHz negative frequency shift (mechanics effects), and a reduced 4 kHz negative frequency shift (acoustics-electricity-mechanics coupling effect), respectively. Moreover, we realize wireless passive detection of NO2 and NH3 based on the SAW sensor. Our work provides valuable insights that can serve as a guide to the design and fabrication of single sensors offering multi-component gas detection via different gas sensing mechanisms.

materials science, multidisciplinary,chemistry, physical,physics, applied,nanoscience & nanotechnology
A review of piezoelectric MEMS sensors and actuators for gas detection application

Saeed S. Ba Hashwan,Mohd Haris Md. Khir,Illani Mohd Nawi,Mohamad Radzi Ahmad,Mehwish Hanif,Furqan Zahoor,Y. Al-Douri,Abdullah Saleh Algamili,Usman Isyaku Bature,Sami Sultan Alabsi,Mohammed O. Ba Sabbea,Muhammad Junaid

DOI: https://doi.org/10.1186/s11671-023-03779-8

2023-03-01

Discover Nano

Abstract:Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors' characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal–organic framework, and graphene.
Recent advancements in physical and chemical MEMS sensors

Yo Tanaka

DOI: https://doi.org/10.1039/d4an00182f

2024-06-09

The Analyst

Abstract:Microelectromechanical systems (MEMSs) are microdevices fabricated using semiconductor-fabrication technology, especially those with moving components. This technology has become more widely used in daily life, e.g. , in mobile phones, printers, and cars. In this review, MEMS sensors are largely classified as physical or chemical ones. Physical sensors include pressure, inertial force, acoustic, flow, temperature, optical, and magnetic ones. Chemical sensors include gas, odorant, ion, and biological ones. The fundamental principle of sensing is reading out either the movement or electrical-property change of microstructures caused by external stimuli. Here, sensing mechanisms of the sensors are explained using diagrams with equivalent circuits to show the similarity. Examples of multiple parameter measurement with single sensors ( e.g. quantum sensors or resonant pressure and temperature sensors) and parallel sensor integration are also introduced.

chemistry, analytical

Gas Sensor Based on MEMS Technology

The Research on the Gas Sensor Based on LAPS and Nanometer Porous Silicon

The Optimal Design and Application QCM Gas Sensor

Progress on Micro Cantilever Resonant Gas Sensors

The Development Of Several Normal Gas Sensors

Gas Detection Microsystem With MEMS Gas Sensor and Integrated Circuit

MEMS-based Sensing Technology for the Gas Chromatograph Analysis

A review of MEMS-based metal oxide semiconductors gas sensor in Mainland China

A Wide-Range and High-Resolution Detection Circuit for MEMS Gas Sensor

A Smart Resonating Micro-Cantilever in MEMS Gas Sensor: Improved Design

MEMS Gas Sensors: A Review

The bottleneck and innovation key of MEMS-based metal oxide semiconductors gas sensor for petrochemical industry

MEMS Based H2 Gas Sensors

Trace Gas Sensor Based on Mems Cantilever Resonator

Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach

Thermally-Excited MEMS Cantilever Resonator for Gas Sensing

Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid

Advances in sensing mechanisms and micro/nanostructured sensing layers for surface acoustic wave-based gas sensors

Integrated sensor based on acoustics-electricity-mechanics coupling effect for wireless passive gas detection

A review of piezoelectric MEMS sensors and actuators for gas detection application

Recent advancements in physical and chemical MEMS sensors