The Development Of Several Normal Gas Sensors

李冬梅,黄元庆,张佳平,张鑫,辜克兢
DOI: https://doi.org/10.3969/j.issn.1006-883X.2006.01.001
2006-01-01
Abstract:With the development of the gas sensor, more and more applications are implemented, especially in testing the environment quality and the industry’s safety production, even people’s life. The gas sensors’ working principles including the new development of several normal poisonous gases and flammable gases will be introduced. A novel production technics-MEMS which is applied to fabricate the gas sensor will also be mentioned.
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