The Research on the Gas Sensor Based on LAPS and Nanometer Porous Silicon

ZONG Xiao-lin,CAI Hua,YU Hui,WANG Ping
DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.219
2006-01-01
Abstract:A new kind of sensor for gas test based on the method of light addressable potentiometric sensor(LAPS) and porous silicon technique is developed. Combined with the MicroElectro Mechanical System (MEMS) techniques for the LAPS fabrication and the characteristics of this kind of planar apparatus, a new way for the detection of gases released during the metabolism of cells is attainable. From some primary results, it is shown that, the sensor had relatively evident response to alcohol gas under the room temperature, along with some concentration gradient characteristics. The feasibility of the design of this kind of sensor is proved.
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