Abstract:Silicon nanowire field-effect transistor (SiNW-FET) sensors possess the ability of rapid response, real-time, and label-free detection with high sensitivity and selectivity in the analysis of charged molecules. Their nano-scale size makes them well suited for ultralow detection of charged molecules, but also brings the uniformity fabrication challenging, thus limiting their large-scale application. By a horizontal control approach, highly controllable silicon nanowires arrays at the top of the silicon-on-insulator (SOI) wafer (T-SiNW) were developed in our previous work. To further improve the device uniformity, here a novel SiNW fabricated approach was carefully designed by the combination of horizontal and vertical control. The new silicon nanowires appeared at the bottom of the top silicon layer (B-SiNW). The B-SiNW has a relatively low requirement on the fabrication process and better device uniformity compared to T-SiNW. These improvements resulted in the B-SiNW device with a lower current fluctuation (4.1 nA with 5.1% variations) in the flowing liquid, compared to the T-SiNW device (4.4 nA with 11% variations). Further, in quantitative detection of 40 ng/mL MMP-9, the B-SiNW sensors provided larger signals and lower fluctuation (normalized average response value: 0.57 with 4.2% variations), compared to the T-SiNW sensors (0.41 with 12.1% variations), thus indicating a more accurate bio-analysis application of the B-SiNW sensor. This work advances the nanowire sensor technology a step closer toward large-scale application to create stable sensing platforms in disease diagnosis and monitoring.

Silicon nanowire sensor for gas detection fabricated by nanoimprint on SU8/SiO2/PMMA trilayer

Trilayer nanoimprint fabrication and simulation of the silicon nanowire sensor for gas detection

22nm silicon nanowire gas sensor fabricated by trilayer nanoimprint and wet etching

Ultrasensitive In2O3-Based Nanoflakes for Lung Cancer Diagnosis and the Sensing Mechanism Investigated by Operando Spectroscopy.

Silicon nanowires by combined nanoimprint and angle deposition for gas sensing applications

Bioinspired supramolecular arrayed heterojunction-based room-temperature sensor for high-performance gas detection

Ultrasensitive flexible NO2 gas sensors via multilayer porous polymer film

Conductive polymer nanowire gas sensor fabricated by nanoscale soft lithography

Highly Sensitive Ammonia Gas Detection at Room Temperature by Integratable Silicon Nanowire Field-Effect Sensors

A vertical tip-tip contact silicon nanowire array for gas sensing

Polyaniline/polystyrene single-nanowire devices for highly selective optical detection of gas mixtures.

Wafer-level fabricated high-performance micro/nano gas sensor

ZnO Nanorod/porous Silicon Nanowire Hybrid Structures As Highly-Sensitive NO2 Gas Sensors at Room Temperature

Self-heated WO3 nanowires for selective and sensitive detection of NO2 gas at room temperature

A controllable fabrication improved silicon nanowire array sensor on (111) SOI for accurate bio-analysis application

One-Dimensional Bi 2 S 3 Nanobelts-Based Surface Acoustic Wave Sensor for NO 2 Detection at Room Temperature

Fabrication of Silicon Nanowire Sensors for Highly Sensitive pH and DNA Hybridization Detection

Gas Sensors Based on Semiconducting Nanowire Field-Effect Transistors

Highly enhanced response of MoS2/porous silicon nanowire heterojunctions to NO2 at room temperature

Low Power Consumption Gas Sensor Created from Silicon Nanowires/TiO2 Core-Shell Heterojunctions

Highly Sensitive Room-Temperature NO2 Gas Sensors Based on Three-Dimensional Multiwalled Carbon Nanotube Networks on SiO2 Nanospheres