Wafer-level fabricated high-performance micro/nano gas sensor

Tie Li,Lei Xu,Le Luo,Yuelin Wang
2017-01-01
Abstract:Nano-structured materials, in particular nanoparticles, nanotubes, and nanowires, make it possible to have gas sensor at sensitivity of ppb level. However, mass production at low cost is always desirable but unachieved in such gas sensors. We will review our work of wafer-level fabrication of high-performance micro/nano gas sensor by naturally integrating micro-hot-platform (MHP) with nano structure. By introducing colloidal crystal template, a wafer-level ordered homogenous SnO2 nano-pore array is synthesized on a 4-inch MHP wafer, able to be produced thousands of gas sensing units in one batch. The integration of micromachining process and nanofabrication process endues micro/nano gas sensing chips at low cost, high throughput, and with high sensitivity (down to ppb level), fast response time (down to 1 s), and low power consumption (down to 30 mW). The proposed method represents a versatile approach for wafer-level fabrication of high-performance micro/nano gas sensors for real industrial applications.
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