Abstract:The ever-stronger attention paid to enhancing safety in the workplace has led to novel sensor development and improvement. Despite the technological progress, nanostructured sensors are not being commercially transferred due to expensive and non-microelectronic compatible materials and processing approaches. In this paper, the realization of a cost-effective sensor based on ultrathin silicon nanowires (Si NWs) for the detection of nitrogen dioxide (NO2) is reported. A modification of the metal-assisted chemical etching method allows light-emitting silicon nanowires to be obtained through a fast, low-cost, and industrially compatible approach. NO2 is a well-known dangerous gas that, even with a small concentration of 3 ppm, represents a serious hazard for human health. We exploit the particular optical and electrical properties of these Si NWs to reveal low NO2 concentrations through their photoluminescence (PL) and resistance variations reaching 2 ppm of NO2. Indeed, these Si NWs offer a fast response and reversibility with both electrical and optical transductions. Despite the macro contacts affecting the electrical transduction, the sensing performances are of high interest for further developments. These promising performances coupled with the scalable Si NW synthesis could unfold opportunities for smaller sized and better performing sensors reaching the market for environmental monitoring.

Silicon nanowires by combined nanoimprint and angle deposition for gas sensing applications

22nm silicon nanowire gas sensor fabricated by trilayer nanoimprint and wet etching

Silicon nanowire sensor for gas detection fabricated by nanoimprint on SU8/SiO2/PMMA trilayer

Trilayer nanoimprint fabrication and simulation of the silicon nanowire sensor for gas detection

Large-area alignment of tungsten oxide nanowires over flat and patterned substrates for room-temperature gas sensing

Growth of carbon nanowalls at atmospheric pressure for one-step gas sensor fabrication

A vertical tip-tip contact silicon nanowire array for gas sensing

WO3 Nanosheet/W18O49 Nanowire Composites for NO2 Sensing

ZnO Nanorod/porous Silicon Nanowire Hybrid Structures As Highly-Sensitive NO2 Gas Sensors at Room Temperature

Conductive polymer nanowire gas sensor fabricated by nanoscale soft lithography

One-Dimensional Nanowire-Based Heterostructures for Gas Sensors

An In2O3 Nanowire-Like Network Fabricated on Coplanar Sensor Surface by Sacrificial CNTs for Enhanced Gas Sensing Performance

Synthesis and Enhanced Gas-Sensing Properties of Ultralong Nio Nanowires Assembled with Nio Nanocrystals

High-performance PANI sensor on silicon nanowire arrays for sub-ppb NH3 detection

Wafer-level fabricated high-performance micro/nano gas sensor

Fabrication of Silicon Nanowire Devices for Ultrasensitive, Label-Free, Real-Time Detection of Biological and Chemical Species.

Silicon Nanowires for High-Sensitivity Glucose Detection

Ultrathin Silicon Nanowires for Optical and Electrical Nitrogen Dioxide Detection

Single-Crystalline Sb-Doped Sno2 Nanowires: Synthesis and Gas Sensor Application

Self-heated WO3 nanowires for selective and sensitive detection of NO2 gas at room temperature

Nanofabrication of Silicon Nanowires with High Aspect Ratio for Photo-Electron Sensing