The bottleneck and innovation key of MEMS-based metal oxide semiconductors gas sensor for petrochemical industry

Yuxin Zhao

DOI: https://doi.org/10.1016/j.cej.2024.151431

IF: 15.1

2024-04-24

Chemical Engineering Journal

Abstract:The surge in Internet of Things demands propels advancements in gas sensor technology, with MEMS-based semiconductor sensors standing out for petrochemical monitoring due to their ideal balance of cost, size, and performance. These sensors employ nanostructured materials, enabling features like compact design, significant data capture with minimal power usage, and the potential for enhanced electronic properties through structural synergies. Despite their growing deployment for detecting hazardous gases, challenges in material selection and hardware engineering impede broader application. The vast diversity of sensing materials necessitates efficient selection methods beyond traditional trial-and-error, critical for achieving desired sensor performance. Key issues also include the energy consumption of miniaturized chips with microheaters, and the complexity of precisely controlling material placement at the micro- and nanoscale. These challenges result in variable sensor responses and reliability concerns, highlighting the need for innovative solutions to unlock the full potential of MEMS gas sensors in the petrochemical industry.

engineering, chemical, environmental