Abstract:¶ Corresponding authors Advances in the field of micro/nano-electro-mechanical systems (MEMS and NEMS) now offer unique opportunities in the design of small and ultrasensitive analytical methods. MEMs/NEMs have demonstrated their unique advantages when they are combined with chemistry and biology, including fast, real-time responses. In addition, MEMs and NEMS are small enough to be integrated into other devices. One of the most promising MEMs is microcantilevers, which have been proven to be an outstanding transducer for chemical and biological sensors. This review summarizes the receptors and immobilization approaches reported for nanomechanical sensors and interpret the mechanism and dynamic relationship of recognition induced nanomechanical motions. Since the three pioneer papers (1-3) published in 1994, the micro/nanocantilever sensor technology had boomed and become a promising sensor technology. Microcantilever sensors have several advantages over many other sensor technologies, including faster response time, lower cost of fabrication, the possibility of sensor arrays with small overall dimensions, the ability to explore microenvironments, and improved portability for field applications. SEM pictures of microcantilevers are shown in Fig. (1). Microcantilevers are miniature diving boards that are micromachined from silicon or other materials. The length of these cantilevers is often in the range of 100-200 microns while the thickness ranges from 200 -1000 nm; Recent advances in micromachining cantilever beams that can detect extremely small forces and mechanical stresses promise to bring about a revolution in the field of chemical, physical, and biological sensor development.

Development of Microcantilever-Based Chemical and Biological Sensors

Microcantilever Biosensors for Chemicals and Bioorganisms

Molecular Recognition of Chem/Biowarfare Agents Using Micromechanical Sensors

Mechanical and Electronic Approaches to Improve the Sensitivity of Microcantilever Sensors.

Chemical Specificity in Nanomechanical Sensors

Molecular recognition of biowarfare agents using micromechanical sensors.

Current Development of Miniature Electrochemical Sensors

Chemical and Biological Sensors Based on Microcantilever Structure

Microcantilever (MCL) Biosensing

Simulation and Design of Piezoelectric Microcantilever Chemical Sensors

Fabrication and characterization of SiO2 microcantilever for microsensor application

Chemical Sensors and Measurement

Development of Novel and Sensitive Sensors Based on Microcantilever of Atomic Force Microscope*

Improved Surface Modification Approach for Micromechanical Biosensors

Review—Reaction-Based Microcantilever Sensors

Fabrication of SiO $_{2}$ Microcantilever Using Isotropic Etching With ICP

Biochemical Sensors Based on Piezoresistive Microcantilevers

Microcantilever Biosensors: Probing Biomolecular Interactions at the Nanoscale

Micromechanical cantilever-based biosensors

Microcantilever-based platforms as biosensing tools