A Smart Wide Range Resonance Gas Sensor with a Multi-Mode Single-Port Micro-Cantilever

Zhao Jiahao,Li Peng,Guan Liu,Li Xiangyu,You Zheng

DOI: https://doi.org/10.13494/j.npe.2013.029

2013-01-01

Nanotechnology and Precision Engineering

Abstract:A cantilever based resonance gas sensor monitors the resonant frequency shift of the cantilever in order to detect certain gas molecules.This paper presents a smart resonance gas sensor,in which a multi-mode single-port micro-cantilever is driven by a self-actuating and detecting(SAD) circuit loop.The motivation of the SAD loop simplifies the structure and micro-machining process of the cantilever.Furthermore,it has a smart function to make the resonating cantilever transfer its resonance mode conveniently for a wide detection range.The model and the sensitivity distribution of the micro-cantilever device in different resonance modes are analyzed.The gas response features of the proposed gas sensor,in which the single-port cantilever operated in multi-mode,are also investigated to demonstrate the design of the multi-mode SAD system and smart function of mode switch for wide detection range.