Abstract:Ultrasensitive zinc oxide nanobeam resonators are prepared based on single‐crystal ZnO nanowires with a length of hundreds of micrometers and diameter down to a few nanometers, whose mass detection sensitivity is demonstrated to be 11.13 Hz fg−1 experimentally and detection resolution is down to 0.2 yg at room temperature with molecular dynamics simulations. Nanomechanical resonators are expected to be exceptional sensors for high‐performance mass detection, mechanical sensing, and signal processing. In this paper, zinc oxide nanobeam resonators are produced based on single‐crystal ZnO nanowire, which has a typical diameter down to a few nanometers and the length of hundreds of micrometers. This resonator has the characteristics of high aspect ratio nanobeam structure and reliable material. It is observed that the resonance frequency of ZnO nanobeam resonator is up to 1.47 MHz with a high quality factor of 2300 at room temperature, which will play a key role in high‐sensitivity mass detection. The mass detection of ZnO nanobeam resonator is demonstrated by depositing platinum atoms on the middle of the beam, which shows a sensitivity of 11.13 Hz fg−1 indicating its ultrasensitive mass detection capability. In addition, according to the experiment, the molecular dynamics simulations for the resonator is established, which shows that the detection resolution down to 0.2 yg at room temperature can be realized based on this resonator. The results show that the ZnO nanobeam resonator has enormous potential in ultrasensitive detection for biosensing and gas sensing.

Design of a Silicon Beam Resonator for a Novel Gas Sensor

The Research on the Gas Sensor Based on LAPS and Nanometer Porous Silicon

Analysis and Design of Refractive Index Biosensors Based on Single Silicon Nanobeam Cavity

A high frequency SiC nanobeam resonator with ultra-sensitivity

MEMS Resonant Beam with Outstanding Uniformity of Sensitivity and Temperature Distribution for Accurate Gas Sensing and On-Chip TGA

A Smart Resonating Micro-Cantilever in MEMS Gas Sensor: Improved Design

Thermally-Excited MEMS Cantilever Resonator for Gas Sensing

Improvement of a Micro-Beam in a Smart Gas Sensor with Resonating Mechanism

High-sensitivity miniature dual-resonance photoacoustic sensor based on silicon cantilever beam for trace gas sensing

Silicon Nanowire Waveguide Sensor Based on Two Cascaded Ring Resonators

Electrothermal Driving Microcantilever Resonator As a Platform for Chemical Gas Sensing

Direct Bonding SOI Wafer Based MEMS Cantilever Resonator for Trace Gas Sensor Applicaiton

Gas Molecules Recognition Via the Response Time of Silicon Nanophotonic Ring Resonator

High-sensitivity silicon photonic biosensors based on cascaded resonators

A Zinc Oxide Nanobeam Resonator for Ultrasensitivity Mass Detection

An Integrated Photonic Gas Sensor Enhanced by Optimized Fano Effects in Coupled Microring Resonators With an Athermal Waveguide

Silicon nanowire sensor for gas detection fabricated by nanoimprint on SU8/SiO2/PMMA trilayer

Resonating Frequency of a SAD Circuit Loop and Inner Microcantilever in a Gas Sensor

Silicon-based double fano resonances photonic integrated gas sensor

Self-Excited Piezoelectric Microcantilever For Gas Detection

Investigation of the Frequency Shift of A Sad Circuit Loop and the Internal Micro-Cantilever in A Gas Sensor