Silicon Nanowire Waveguide Sensor Based on Two Cascaded Ring Resonators

Xianxin Jiang,Lei Jin,Mingyu Li,Jian-Jun He
DOI: https://doi.org/10.1364/acpc.2012.as4e.3
2012-01-01
Abstract:We report the latest experimental results of cascaded double ring sensor. To improve the sensitivity, nanowire waveguide sensor operating in TM polarization is designed and fabricated, with the help of the e-beam lithography system. The measured transmission spectrum shows good agreement with theoretical analysis.
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