High-Sensitive Multi-Gas Detection Based on MDM Waveguide With Symmetric Dual Side-Coupled Ring-Resonators

Benlei Zhao,Hai Liu,Xu Zhang,Bo Wu,Hancheng Zhang
DOI: https://doi.org/10.1109/jsen.2021.3097168
IF: 4.3
2021-09-15
IEEE Sensors Journal
Abstract:A high-sensitive multi-parameter gas sensor composed of symmetric dual side-coupled ring resonators in a metallic-dielectric-metallic (MDM) structure is investigated by the finite difference time domain (FDTD) method. The dual side-coupled resonators have lower transmission dip and faster response due to the superposition of the outgoing fields' amplitude of the symmetric dual resonators, which is very beneficial for detection. Two independently tunable transmission dips are achieved by expanding the ring resonator in <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="1.33ex" height="1.676ex" style="vertical-align: -0.338ex;" viewBox="0 -576.1 572.5 721.6" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-78" x="0" y="0"></use></g></svg></span> -direction, making it possible for dual-parameter sensing. The electric and magnetic distribution characteristics at the two resonant wavelengths are analyzed. Another plasmonic structure expanded along both sides in a central resonator-straight waveguide way is also investigated, and the former structure expanded in <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="1.33ex" height="1.676ex" style="vertical-align: -0.338ex;" viewBox="0 -576.1 572.5 721.6" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-78" x="0" y="0"></use></g></svg></span> -direction works better in detection difficulty and structural utilization. After optimizing the radius and position of ring resonators, the refractive index sensitivities of cavity A and B can reach 2427 nm/RIU and 2431.9 nm/RIU, respectively. The methane and hydrogen sensitivities are −9.213 nm/% and −1.65 nm/% with an extremely high linearity, after coating the methane and hydrogen gas-sensitive film in cavity A and B respectively. This investigation provides an effective way for the design of multi-parameter high-sensitive independently tunable sensors.<svg xmlns="http://www.w3.org/2000/svg" style="display: none;"><defs id="MathJax_SVG_glyphs"><path stroke-width="1" id="MJMATHI-78" d="M52 289Q59 331 106 386T222 442Q257 442 286 424T329 379Q371 442 430 442Q467 442 494 420T522 361Q522 332 508 314T481 292T458 288Q439 288 427 299T415 328Q415 374 465 391Q454 404 425 404Q412 404 406 402Q368 386 350 336Q290 115 290 78Q290 50 306 38T341 26Q378 26 414 59T463 140Q466 150 469 151T485 153H489Q504 153 504 145Q504 144 502 134Q486 77 440 33T333 -11Q263 -11 227 52Q186 -10 133 -10H127Q78 -10 57 16T35 71Q35 103 54 123T99 143Q142 143 142 101Q142 81 130 66T107 46T94 41L91 40Q91 39 97 36T113 29T132 26Q168 26 194 71Q203 87 217 139T245 247T261 313Q266 340 266 352Q266 380 251 392T217 404Q177 404 142 372T93 290Q91 281 88 280T72 278H58Q52 284 52 289Z"></path></defs></svg>
engineering, electrical & electronic,instruments & instrumentation,physics, applied
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