Application of MEMS in Inertial Measurement

李志信,罗小兵,过增元

DOI: https://doi.org/10.3969/j.issn.1000-9787.2001.07.019

2001-01-01

Abstract:Application status of MEMS in inertial measurement is summarized, the basic principles of accelerometers and gyroscopes and their commercialization situation are briefly introduced, some ideas about development of micromachined inertial sensor in China are presented.

What problem does this paper attempt to address?

The Conception of MEMS and Current Development at Home and Abroat

刘文耀,杜君文,应济

DOI: https://doi.org/10.3969/j.issn.1002-2333.2001.02.002

2001-01-01

Abstract:The principle and relevant technology of GEMS are introduced. The current development of this technology at home and abroad and the prospect are also involved.
Status and development trend of MEMS inertial sensors

Jin Xiaofeng,Li Xiaoyang,Peng Yongqing,W. Weikui,Wang Shouli

Abstract:: Inertial sensors based on MEMS (Micro-Electro-Mechanical System) technology have the advantages of light weight, low cost, small size, etc., they have extremely broad application and development prospects in civil, aerospace and military fields. With the rapid development of MEMS technology, the performance indicators of MEMS inertial sensors have also been significantly improved. The basic working principle, classification and research status of MEMS gyroscope, MEMS accelerometer and MEMS inertial measurement unit (IMU) are sorted out and the development trend of MEMS gyroscope, MEMS accelerometer and MEMS inertial measurement unit are analyzed and forecasted.

Physics,Engineering
Inertia measure using MEMS gyroscope

王犇,袁涛,谭涛

DOI: https://doi.org/10.3969/j.issn.1008-0570.2008.26.063

2008-01-01

Abstract:MEMS(Micro-Electro-Mechanical system) inertial sensor has been widely used.This paper presents a micro inertia measure system based on a new kind of MEMS gyroscope. The measure system adopts an ADIS16255 gyroscope from ANALOG DIVICES company,it has an high precision,and enables self-calibration.This system is small,light and easy to expand.In this paper,we give the design principles and software flow chart.
Status Quo and Developing Trend of MEMS-Gyroscope Technology

Yu Fei,Xiaolong Li,Wei Xiao

DOI: https://doi.org/10.1109/IMCCC.2015.159

2015-09-01

Abstract:With the rapid development of MEMS technology, MEMS-gyroscopes with its perfect characteristics of small size, light weight, low cost and environmental adaptability are getting a wild rang application including both civilian and military fields. At first, this paper introduces how the MEMS-gyroscope works from the basic mechanics, the internal structure and performance analysis of basic characteristics. And then the paper presents and analyzes the current status of the development of MEMS gyroscope technology. And based three different market conditions and working environments, the applications of MEMS gyroscopes are discussed in this paper. Finally, the developing trends of MEMS gyroscopes are analyzed from the technological and market perspectives.

Engineering,Materials Science
Summary of Research Status and Application of MEMS Accelerometers

Shijiazhuang

DOI: https://doi.org/10.4236/JCC.2018.612021

2018-12-12

Abstract:The rapid development of MEMS technology has made MEMS accelerometers mature and the application range has been expanded. Many kinds of MEMS accelerometers are researched. According to the working principle of MEMS accelerometer, it can be divided into: piezoresistive, piezoelectric, capacitive, tunnel, resonant, electromagnetic, thermocouple, optical, inductive, etc. Due to its outstanding features in terms of size, quality, power consumption and reliability, MEMS sensors are used in military applications and where high environmental resistance is required. MEMS accelerometers are developing rapidly and have good application prospects. In order to make MEMS accelerometers more widely understood, the advantages of MEMS accelerometers are expounded. The research status of MEMS accelerometers is introduced, and MEMS are analyzed. The application of accelerometers in real-world environments, and the development trend of MEMS accelerometers in the future. More scholars will invest in MEMS accelerometer research, pursuing high performance, low power consumption, high precision, multi-function, and interaction. Strong MEMS accelerometers will be ubiquitous in the future.

Materials Science,Engineering,Chemistry
Micro Inertial Measurement System

Jh Lan,Zy Zhou,L Li,Dy Tu,Wz Zhao

2002-01-01

Abstract:A micro inertial measurement system based on MEMS technology and its constituting principle are described. In order to realize the measuring position and pose, the coordinate transition, attitude matrix solution, position and pose calculation are studied with corresponding mathematics model and algorithms presented. The experiments are carried out in principle and results of it are given. It is proved that the micro inertial measurement system is effective and correct.
Design and Fabrication for Inertial Micro Sensors

GY Wu,ZX Xiao,ZH Li,YL Hao

DOI: https://doi.org/10.1109/icsict.1998.786512

1998-01-01

Abstract:This paper mainly reviews the design rules and working principles of the main inertial sensors, which include the accelerometer and gyroscope, and the main micromachining technology used at the present time. The main research projects on the inertial sensors at the Institute of Microelectronics, Peking University, have been also illustrated.
Research on Microelectron-Mechanical System and Its Application

Shi-xiang Jiang,Shi-qiang ZHU,Wen-sheng Huang

2001-01-01

Abstract:Theoretical and technical basis of MEMS are introduced.Future application of microelectron-machine to space,medicine,national defense and industries are listed in this paper.
Micromachined Fluid Inertial Sensors

Shiqiang Liu,Rong Zhu

DOI: https://doi.org/10.3390/s17020367

IF: 3.9

2017-01-01

Sensors

Abstract:Micromachined fluid inertial sensors are an important class of inertial sensors, which mainly includes thermal accelerometers and fluid gyroscopes, which have now been developed since the end of the last century for about 20 years. Compared with conventional silicon or quartz inertial sensors, the fluid inertial sensors use a fluid instead of a solid proof mass as the moving and sensitive element, and thus offer advantages of simple structures, low cost, high shock resistance, and large measurement ranges while the sensitivity and bandwidth are not competitive. Many studies and various designs have been reported in the past two decades. This review firstly introduces the working principles of fluid inertial sensors, followed by the relevant research developments. The micromachined thermal accelerometers based on thermal convection have developed maturely and become commercialized. However, the micromachined fluid gyroscopes, which are based on jet flow or thermal flow, are less mature. The key issues and technologies of the thermal accelerometers, mainly including bandwidth, temperature compensation, monolithic integration of tri-axis accelerometers and strategies for high production yields are also summarized and discussed. For the micromachined fluid gyroscopes, improving integration and sensitivity, reducing thermal errors and cross coupling errors are the issues of most concern.
A Research on Calibration of Low-Precision Mems Inertial Sensors

Ren Wei,Zhang Tao,Zhang Hai-yun,Wang Lei-gang,Zhou Yong-jie,Luan Meng-kai,Liu Hui-feng,Shi Jing-wei

DOI: https://doi.org/10.1109/ccdc.2013.6561506

2013-01-01

Abstract:Micro-electromechanical systems (MEMS) are an emerging technology that has the potential for a multitude of uses. MEMS sensors are cost-effective units with small dimensions, but suffer from large random errors compared with their mechanical predecessors. It is hard to have an accurate description of sensor errors because the characteristics of errors are quite different among the MEMS inertial sensors with the same specifications. Installation errors result from the imperfection in welding the MEMS sensor which consists of a triaxial accelerometer and a triaxial gyroscope on a single-chip. Low-precision MEMS inertial sensors exhibit biases, scale factors, and large installation errors. According to the error characteristics of MEMS inertial sensors, a mathematical model was analyzed. The validity of the six-position test was verified by using the correction between the triaxial accelerometer and the triaxial gyroscope on one single-chip. One method to identify the intersection angle among the sensitive axes and the measured vector was analyzed. The test results show that the calibration can effectively correct the bias, scale factor and installation error of MEMS inertial sensors.
MEMS Inertial Sensor Calibration Technology: Current Status and Future Trends

Xu Ru,Nian Gu,Hang Shang,Heng Zhang

DOI: https://doi.org/10.3390/mi13060879

IF: 3.4

2022-06-01

Micromachines

Abstract:A review of various calibration techniques of MEMS inertial sensors is presented in this paper. MEMS inertial sensors are subject to various sources of error, so it is essential to correct these errors through calibration techniques to improve the accuracy and reliability of these sensors. In this paper, we first briefly describe the main characteristics of MEMS inertial sensors and then discuss some common error sources and the establishment of error models. A systematic review of calibration methods for inertial sensors, including gyroscopes and accelerometers, is conducted. We summarize the calibration schemes into two general categories: autonomous and nonautonomous calibration. A comprehensive overview of the latest progress made in MEMS inertial sensor calibration technology is presented, and the current state of the art and development prospects of MEMS inertial sensor calibration are analyzed with the aim of providing a reference for the future development of calibration technology.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
A Novel Approach for Attitude Estimation Using Mems Inertial Sensors

Zheming Wu,Zhenguo Sun,Wenzeng Zhang,Qiang Chen

DOI: https://doi.org/10.1109/icsens.2014.6985177

2014-01-01

Abstract:In this paper a new method for attitude estimation using low-cost MEMS inertial sensors is developed, in order to obtain accurate attitude parameters when other external sensors such as magnetometer and GPS are limited in operation. The method is based on specific rotation of the inertial measurement unit independent from rigid body motion. An algorithm is developed by incorporating a nonlinear observer in order to fusing measurements from both the gyroscope and the accelerometers. The algorithm provides bias estimation of the gyroscope and better estimation results. Experiments validate the effectiveness of the proposed method.
Applications and Prospects of Mems Sensors in Automotive

Li Jin

DOI: https://doi.org/10.1088/1742-6596/1884/1/012010

2021-04-01

Journal of Physics: Conference Series

Abstract:Abstract MEMS sensor is a new type of sensor and is made by micro-electronic and micro-mechanical processing technology. It has many advantages such as small volume, light weight, low cost, low power consumption, high reliability, suitable for mass production, easy integration and intelligent realization. It is widely used in the automobile, effectively improving the performance of the automobile sensor, promoting the progress of the automobile industry and the intelligent automobile. This paper mainly discusses the market size of MEMS sensors and their applications in the automotive field, focusing on MEMS pressure sensors, MEMS acceleration sensors and gyroscope sensors. The development direction of MEMS sensors in the automotive field is forecasted.
A Review on the Inertial Measurement Unit Array of Microelectromechanical Systems

Jiawei Xuan,Ting Zhu,Gao Peng,Fayou Sun,Dawei Dong

DOI: https://doi.org/10.3390/s24227140

IF: 3.9

2024-11-07

Sensors

Abstract:In recent years, microelectromechanical systems (MEMS) technology has developed rapidly, and low precision inertial devices have achieved small volume, light weight, and mass production. Under this background, array technology has emerged to achieve high precision inertial measurement under the premise of low cost. This paper reviews the development of MEMS inertial measurement unit (IMU) array technology. First, the different types of common inertial measurement unit arrays are introduced and the basic principles are explained. Secondly, IMU array's development status is summarized by analyzing the research results over the years. Then, the key technologies and corresponding development status of IMU array are described, respectively, including error analysis modeling and calibration, data fusion technology, fault detection, and isolation technology. Finally, the characteristics and shortcomings of the past research results are summarized, the future research direction is discussed, and some thoughts are put forward to further improve the accuracy of the IMU array.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
One Single Chip Micro Inertial Measurement Unit

CHANG Hong-long,JIANG Qing-hua,CUI Jin-qiang,LI Qian,YUAN Wei-zheng,YANG Fang

DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.247

2006-01-01

Abstract:This paper presented one single chip micro inertial measurement unit based on ordinary bulk micromachining process such as dissolved wafer process. The length and width of lateral gaps between the different structure patterns were adjusted to be as similar as possible through comprehensive optimization of the six sensing structures, thus the deep reactive ion etching lag effect could hardly affect the geometry of the structure. The sample chip integrated six inertial sensors, i.e. the X-axis,Y-axis and Z-axis accelerometers and gyroscopes, on one area which was smaller than 1 cm~2. The test results showed that the gyroscopes' bias stability could reach 1 degree per second and the accelerometers' scale factor was about 33 mV/g_n. The study result of the paper proves the feasibility of the simple integration method, which could greatly reduce the size of inertial measure unit.
MEMs for Aerospace Navigation

J. Leclerc,Jacques Leclerc

DOI: https://doi.org/10.1109/maes.2007.4385708

IF: 2.902

2007-01-01

IEEE Aerospace and Electronic Systems Magazine

Abstract:The MEMS aerospace market has its own specificities in terms of market size, standards, and performance characteristics (very long term stability, reliability, and safety levels). Improvements are needed for future applications. THALES Avionics has a twenty-year experience in quartz and silicon MEMS design and manufacturing and is recognized as a leader by the French MOD in this field. MEMS pressure sensors and accelerometers are manufactured in large volume and used for safety-critical applications. THALES technology policy focused on planar architecture, die vacuum packaging, and deep reactive ion etching (DRIE) allowing good characteristics for sensors in development. A Silicon Vibrating Beam Accelerometer single chip is now under development. Its operating principle is described with two resonators in push-pull configuration. A tuning fork planar rate gyro is also developed with exactly the same technology for industrial efficiency. Performance results will be addressed. The development and industrialization road-map of theses inertial products is described for the following five years. Gyro-compassing grade inertial sensors would be available during the next decade allowing low-cost, high-grade navigators using simultaneously GNSS receivers and inertial MEMS navigators.

engineering, electrical & electronic, aerospace
An Optical Interferometry Based MEMS Accelerometer Applicable to Seismic-Grade Measurement

Cheng Li,Bo Yang,Xiang Zheng,Zhenyu Sun,Luqiang Zhou,Xin Huang,Xin Guo

DOI: https://doi.org/10.1109/tim.2022.3191649

IF: 5.6

2022-07-29

IEEE Transactions on Instrumentation and Measurement

Abstract:Traditional seismometers and gravimeters normally have large volumes and entail high manufacturing costs. Aiming at the miniaturization of such geophysical instruments, a portable microelectromechanical systems (MEMS) accelerometer applicable to seismic-grade measurements is fabricated and characterized in this work. This accelerometer is operating on the deformable grating-based MEMS interferometer, where a new MEMS out-of-plane sensing chip employing double layers of 10- -thickness spring is first proposed. The simulation results show that this geometry has a low natural frequency of 52.23 Hz and undergoes a low stress of 26.94 MPa under the gravitational acceleration. The test of the fabricated prototype is implemented in a quiet environment for tracking the inherent microseismic peaks of Earth. The evaluation results demonstrate that the fabricated prototype has achieved a voltage sensitivity of 510.6 V/g. Furthermore, the noise estimation indicates that the self-noise of this sensor has reached 20 ng/ from 0.3 to 20 Hz, and a bias stability of 235.4 ng is obtainable at room temperature. Combined with the compact package size of 40.5 cm 3 , the proposed device exhibits a promising prospect in the seismic-grade applications.

engineering, electrical & electronic,instruments & instrumentation
Design of Micro Inertial Measurement Unit Based on Micromachined Thermal Expansion Gas Gyroscope

Wei Jing,Zhu Xinhua,Su Yan

DOI: https://doi.org/10.1109/IMCCC.2013.11

2013-01-01

Abstract:Micro machined Thermal Expansion Gas Gyroscope (MTEGG) based on the principle of thermal expansion is a novel MEMS gyroscope. It is more convenient to use MTEGG to design MIMU, because MTEGG is not only as an angular rate sensor but also as an accelerometer. In this paper, a novel MIMU based on the MTEGG is discussed. The scheme of MTEGG is introduced first, basing on it, the design of detecting & controlling circuits is proposed. Then, the design of MIMU which includes structure design, selection of MCU, data acquisition design, and MCU software design is introduced. In addition, experimental methods of zero-bias stability and scale factor are also introduced. In the end, the designed MIMU based on MTEGG has been tested by experiments. The measurement result of the MIMU show that the zero-bias stability for the angular rate and acceleration of the designed MIMU in x y z axis is 0.9723 mV/(°·s-1), 0.96401 mV/(°·s-1), 0.90556 mV/(°·s-1), 2.568 mg, 2.603 mg, 2.512 mg respectively, while the scale factor of them is 0.541°/s, 0.564°/s, 0.583°/s, 0.72375 mV/g, 0.72301 mV/g, 0.72446 mV/g separately, and the designed MIMU can be used in common navigation field.
Medical Applications of MEMS

汤扬华,叶雄英,周兆英

DOI: https://doi.org/10.3321/j.issn:1004-132x.2001.02.032

2001-01-01

Abstract:MEMS (micro electro mechanical system) is a new field which has alot of advantages: small volume, light weight, low energy consumption,fast response, big batch and low cost etc. MEMS shows huge market potentials because of the prospect of applications in many fields such as industry, agriculture,medicine, communication and military. It will obtain the unreplaceable position in medicine. In this paper, an overview of applications of MEMS in medicine is given with an introduction to MEMS.
Optical Interferometric MEMS Accelerometers

Minghui Zhao,Yonghong Qi,Hailong Wang,Zongxiang Xie,Bo Li,Hairong Wang,Xueyong Wei

DOI: https://doi.org/10.1002/lpor.202300713

2023-12-02

LASER & PHOTONICS REVIEWS

Abstract:Abstract Laser interferometry is one of the most accurate measurement technologies whose displacement resolution can reach the femtometer (fm) level. With the development of Micro‐Electro‐Mechanical Systems(MEMS) technology, many excellent optical interferometric MEMS sensors have emerged, which play an essential role in intelligent manufacturing, aerospace, and many other fields. Among them, optical interferometric MEMS accelerometers develop rapidly due to their high sensitivity, low noise, and anti‐electromagnetic interference advantages. Lots of research in optical interferometric chip design, micro‐nano fabrication process, signal demodulation algorithm, and range extension technology are performed, and different types of MEMS accelerometers based on the optical interferometric principles are developed, which have been demonstrated and applied in the fields of disaster monitoring, equipment operation and maintenance, and resource exploration. This paper reviews the development status of optical interferometric MEMS accelerometers, mainly focusing on the critical problems and solutions that need to be solved in the development process of optical interferometric accelerometers, and finally introduces the typical application scenarios.

Application of MEMS in Inertial Measurement

The Conception of MEMS and Current Development at Home and Abroat

Status and development trend of MEMS inertial sensors

Inertia measure using MEMS gyroscope

Status Quo and Developing Trend of MEMS-Gyroscope Technology

Summary of Research Status and Application of MEMS Accelerometers

Micro Inertial Measurement System

Design and Fabrication for Inertial Micro Sensors

Research on Microelectron-Mechanical System and Its Application

Micromachined Fluid Inertial Sensors

A Research on Calibration of Low-Precision Mems Inertial Sensors

MEMS Inertial Sensor Calibration Technology: Current Status and Future Trends

A Novel Approach for Attitude Estimation Using Mems Inertial Sensors

Applications and Prospects of Mems Sensors in Automotive

A Review on the Inertial Measurement Unit Array of Microelectromechanical Systems

One Single Chip Micro Inertial Measurement Unit

MEMs for Aerospace Navigation

An Optical Interferometry Based MEMS Accelerometer Applicable to Seismic-Grade Measurement

Design of Micro Inertial Measurement Unit Based on Micromachined Thermal Expansion Gas Gyroscope

Medical Applications of MEMS

Optical Interferometric MEMS Accelerometers