MEMS Developments in Tsinghua University

LT Liu,ZJ Li

DOI: https://doi.org/10.1109/icsict.1998.786495

1998-01-01

Abstract:This article introduces MEMS development in the Institute of Microelectronic at Tsinghua University. Several MEMS devices: smart sensors, micromotors, micropump and microphone are described

What problem does this paper attempt to address?

The Conception of MEMS and Current Development at Home and Abroat

刘文耀,杜君文,应济

DOI: https://doi.org/10.3969/j.issn.1002-2333.2001.02.002

2001-01-01

Abstract:The principle and relevant technology of GEMS are introduced. The current development of this technology at home and abroad and the prospect are also involved.
Novel MEMS Devices for Information Systems

Ren Tian-Ling

DOI: https://doi.org/10.1109/aprasc.2004.1422379

2004-01-01

Abstract:MEMS are paid more and more attention in the present information society. With the development of modern information technologies, information systems are becoming more compact, miniature and smart. MEMS devices and systems fit this trend well. The development and properties of MEMS technologies are reviewed. MEMS technologies are based on the technical inter-growing of microelectronics, materials science, mechanics, physics, chemistry, radio science, etc, and they have developed very fast from the very beginning. MEMS technologies are very promising for a wide range of information system applications. Some typical application examples are given.
Research on Microelectron-Mechanical System and Its Application

Shi-xiang Jiang,Shi-qiang ZHU,Wen-sheng Huang

2001-01-01

Abstract:Theoretical and technical basis of MEMS are introduced.Future application of microelectron-machine to space,medicine,national defense and industries are listed in this paper.
Microelectromechanical System Technology and Its Application

张海涛,张斌

DOI: https://doi.org/10.3969/j.issn.1001-2028.2002.04.010

2002-01-01

Abstract:Microelectromechanical system (MEMS) technology makes it possible the moralization and integration of the products based on the material of silicon. This technology is divided into four categories: body, surface, metal and compound micromechanical processes. The basic technologies included in the micromechanical system are erosion, si-bond, multiplayer film sediment without stress, sacrifice layer, LIGA and the combined technologies based on them. The applications of micro-sensors, micro-machines, mechanism filter and resonant filters are presented, and the further development of technology is discussed.
The Study On Mems-Based Micro Pump Technology

Jianguo Cui,Yunlong Wei,Xiaolin Zheng,Hong Wang,Yanqing Wu

DOI: https://doi.org/10.1117/12.664183

2005-01-01

Abstract:The micropump, an important operational device of MEMS, plays a very important role in micro systems. As the micropump becomes smaller and smaller, the fabrication of the moving parts becomes more and more difficult. Therefore, many micropumps based on new principles have been developed. They are divided into two types, pumps with mechanical components and ones without them. To date, most of these micropumps are membrane-driven. The research on the micropump in the past decade is reviewed. The current status of micropump research, the structural designs and principle of operation of microfluidic controlling systems are presented in this paper. Some unresolved problems are discussed. Finally, new ideas are put forward.
Application of MEMS in Inertial Measurement

李志信,罗小兵,过增元

DOI: https://doi.org/10.3969/j.issn.1000-9787.2001.07.019

2001-01-01

Abstract:Application status of MEMS in inertial measurement is summarized, the basic principles of accelerometers and gyroscopes and their commercialization situation are briefly introduced, some ideas about development of micromachined inertial sensor in China are presented.
Emerging Technologies of Micro-Nanoelectromechanical Systems(mems/nems)

李志宏

DOI: https://doi.org/10.1360/112012-508

2012-01-01

Scientia Sinica Informationis

Abstract:The micro-nanoelectromechanical systems (MEMS/NEMS, herein called MEMS for simplicity), which the originate from microelectronics technology, can deal with the thermal, optical, magnetic, chemical, and biological variables. Various structures and devices can be fabricated on a chip through the integration technology. In the last few decades, MEMS has played increasingly important roles in aerospace, military, optical communication, wireless communication, biomedicine, etc., and MEMS products have been widely used in our daily lives. Due to the highly multidisciplinary nature, MEMS shows a diverse research and development trend. This report will discuss the status and trend of the development of MEMS fundamental research. The discussion will focus on the fusion of MEMS technology with integrated circuits, nanotechnology, and modern biotechnology. The strong intervention of the TSMC, the largest IC foundry in the world, in MEMS foundry industry greatly accelerates the pace of integration of MEMS and IC. More and more new nano-materials and nanofabrication technologies have been applied in MEMS technology to promote the performance and the emergence of new devices. On the other hand, NEMS technology provides new nanoscale three-dimensional processing approaches for novel CMOS devices, and spawns new types of IC devices, such as NEMS relays and nano-mechanical memories. The combination with the biotechnology becomes a new growth point of MEMS, where the exible electrode and circuit is one of the typical representatives.
Towards the Integration of Nano/Micro Devices Using MEMS Technology

Weileun Fang,Jerwei Hsieh,Hung-Yi Lin

DOI: https://doi.org/10.1007/1-4020-3951-4_14

2006-01-01

Abstract:Technology platform is the key issue to accelerate the progress of N/MEMS. MUMPs is recognized as the first fabrication platform for MEMS. Many promising MEMS devices have been realized through the MUMPs platform. According the variety of MEMS devices, unique fabrication platform is unable to fulfill the requirements. Presently, other platforms such as SCREAM, SUMMIT, MPW, and CMOS-MEMS have been successfully explored or still under investigation. This presentation intends to introduce two fabrication platforms, named MOSBE and BELST, established in the Micro Devices laboratory of National Tsing Hua University. Moreover, various applications fabricated using these two platforms will also be presented.
Medical Applications of MEMS

汤扬华,叶雄英,周兆英

DOI: https://doi.org/10.3321/j.issn:1004-132x.2001.02.032

2001-01-01

Abstract:MEMS (micro electro mechanical system) is a new field which has alot of advantages: small volume, light weight, low energy consumption,fast response, big batch and low cost etc. MEMS shows huge market potentials because of the prospect of applications in many fields such as industry, agriculture,medicine, communication and military. It will obtain the unreplaceable position in medicine. In this paper, an overview of applications of MEMS in medicine is given with an introduction to MEMS.
Microfabrication Technology of Three-Dimensional Microdevices and Their Mems Applications

JF Li

2002-01-01

Abstract:Recent status of microfabrication technology related to microelectromechanical systems (MEMS) is reviewed with particular emphasis on the introduction of our newly developed three-dimensional microfabrication process using a micromachined silicon wafer as a mold. By using the silicon molding processes, piezoelectric microrod arrays, thermoelectric microelement arrays and silicon carbide micro gas turbine rotors have been successfully fabricated, Their microfabrication processes are described in detail to demonstrate the success of the combination of silicon micromachining and materials processing techniques. The prospects for materials microfabrication in the fields of miniature medical apparatus and portable microscale energy sources are given.
Microelectromechanical systems (MEMS): fabrication, design and applications

Jack W Judy

DOI: https://doi.org/10.1088/0964-1726/10/6/301

IF: 4.1

2001-11-28

Smart Materials and Structures

Abstract:Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and systems on the scale of micrometers. Initially micromachining techniques were borrowed directly from the integrated circuit (IC) industry, but now many unique MEMS-specific micromachining processes are being developed. In MEMS, a wide variety of transduction mechanisms can be used to convert real-world signals from one form of energy to another, thereby enabling many different microsensors, microactuators and microsystems. Despite only partial standardization and a maturing MEMS CAD technology foundation, complex and sophisticated MEMS are being produced. The integration of ICs with MEMS can improve performance, but at the price of higher development costs, greater complexity and a longer development time. A growing appreciation for the potential impact of MEMS has prompted many efforts to commercialize a wide variety of novel MEMS products. In addition, MEMS are well suited for the needs of space exploration and thus will play an increasingly large role in future missions to the space station, Mars and beyond.

materials science, multidisciplinary,instruments & instrumentation
PROGRESSES ON MICROMACHINED FLOW SENSORS BASED ON MEMS TECHNOLOGIES

Peng Jiegang,Zhou Zhaoying,YE Xiongying

DOI: https://doi.org/10.3321/j.issn:1000-0992.2005.03.007

2005-01-01

Abstract:Flow measurement concerns an important measuring parameter in industry process and scientific research. Along with the research and rapid development of micro Electro-Mechanical sysmtes (MEMS) in recent years, the trend of development of the flow rate sensor in the traditional industry and fluid mechanics research is high integrantion level, microminiaturization, high degree of accuracy and high reliability. And, along with research and rapid development of the life sciences, comes the need of new type micromachined flow sensors in microfluid, biology, medicine, helth and food scientific research. Micromachined flow sensors have become a major focus of MEMS. This paper briefly reviews the technological development of MEMS, and introduces the principle and classification of micromachined flow sensors based on MEMS technologies. Emphases are put on the detailed summarization and evaluation of the production technology and application characteristics of micromachined flow sensors such as hotwire, heat transfer, differential pressure, lift force, fluid oscillatory. Coriolis and bionic micromachined flow sensors. A summary of calibration method of micromachined flow sensors is given in this paper. And, this paper specially covers the hot hotwire, heat transfer, differential pressure, optics micromachined flow sensors developed in China. In the end, the three stages of development of micromachined flow sensors based on MEMS technologies, the trend of the micromachined flow sensors based on MEMS technologies in future are discussed.
Design and Fabrication for Inertial Micro Sensors

GY Wu,ZX Xiao,ZH Li,YL Hao

DOI: https://doi.org/10.1109/icsict.1998.786512

1998-01-01

Abstract:This paper mainly reviews the design rules and working principles of the main inertial sensors, which include the accelerometer and gyroscope, and the main micromachining technology used at the present time. The main research projects on the inertial sensors at the Institute of Microelectronics, Peking University, have been also illustrated.
TECHNOLOGY OF SILICON-BASED MEMS

郝一龙,张大成,李婷

DOI: https://doi.org/10.3969/j.issn.1671-7449.2002.z2.032

2001-01-01

Abstract:Concerning the development history of MEMS technology, the present paper introduces a state of the art developing direction of silicon based MEMS machining, indicating that there are two main developing directions. One is sacrificial layers technology, and the other is bulk micromachining. Sacrificial layers technology is developing towards multiple layers and integration. Bulk micromachining mainly includes combination of bonding and deep etching, pursuit to big mass and small stress, and three dimensional fabrications technology which is the developing direction of new body silicon technology. Standard process fabrication is becoming more and more important for MEMS study.
Rf Mems Activities at Imetu

Zewen Liu,Zhihao Hou,Zhijian Li

DOI: https://doi.org/10.1109/apmc.2008.4958442

2008-01-01

Abstract:The research activities on RF-MEMS devices at IMETU (Institute of Microelectronics of Tsinghua University) are presented in this paper. The RF MEMS devices investigated include micro-machined inductors, switches, voltage controlled capacitors. The recent research focus is RF-MEMS switches. Two recently developed DC-contact switches are demonstrated, one is with series configuration and another is shunt. The two types of RF MEMS switch base on the same fabrication process. Borofloattrade glass was used as substrate and a special electroplating process is used to realize the low stress bridge membrane, which assure not only the possible power handling but also a low contact resistance. High performance switches with low insertion loss and high isolation have been obtained with very long life cycle more than 100M times. The S parameters characterization shows the DC-contact series RF MEMS switch is suitable for the application of frequency range from DC to 20 GHz, and the DC-contact shunt RF MEMS switch is suitable for the application of frequency range from DC to 30 GHz.
Future of Microelectromechanical Systems (Mems)

MH Bao,WY Wang

DOI: https://doi.org/10.1016/0924-4247(96)01274-5

1996-01-01

Abstract:The development of microelectromechanical systems (MEMS) based on micromachining and microelectronics technologies has been significant for almost a decade. However, it is unrealistic to consider micromachining technology as a micro version of conventional machining technology. As a matter of fact, micromachining technology stemmed from the planar technology of silicon and is basically a two-dimensional processing technology. On the other hand, it is obvious that a micromachine cannot compare with a conventional machine in strength and power. For the successful development of MEMS in the future, a simple rule is suggested by the experience gained in the past few years: try to avoid as much as possible mechanical coupling with the outside world while trying hard to improve the MEMS technology to enhance the mechanical power of the devices. In addition to that, the strategy proven to be correct for the development of solid-state sensors also applies: MEMS devices should mainly be developed for new applications with a vast market. Their substitution for traditional applications should not be considered as a main strategy of development. Based on these arguments, the future development of MEMS devices and technologies is further discussed in the paper.
Progress of Si-based MEMS Torsion Micromirror

Dachao Li,Wengang Wu,Guizhen Yan,Xing Fu,Yilong Hao,Xiaotang Hu

DOI: https://doi.org/10.3321/j.issn:1004-132X.2005.z1.008

2005-01-01

Abstract:Si-based MEMS torsion micromirror is an important optical component for both military and industrial applications. The research status and the development future of Si-based MEMS torsion micromirrors with different driving mechanisms were discussed in detail. And then the novel applications of Si-based MEMS torsion micromirror in the field of medical and biology were also introduced.
Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

Xianhao Le,Qiongfeng Shi,Philippe Vachon,Eldwin J. Ng,Chengkuo Lee

DOI: https://doi.org/10.1088/1361-6439/ac3ab9

2021-12-03

Journal of Micromechanics and Microengineering

Abstract:Abstract The rapid development of the fifth-generation mobile networks (5G) and Internet of Things (IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and actuators. Piezoelectric microelectromechanical system (MEMS) devices, fabricated by micromachining technologies, provide a versatile platform for various high-performance sensors, actuators, energy harvesters, filters and oscillators (main building blocks in radio frequency front-ends for wireless communication). In this paper, we provide a comprehensive review of the working mechanism, structural design, and diversified applications of piezoelectric MEMS devices. Firstly, various piezoelectric MEMS sensors are introduced, including contact and non-contact types, aiming for the applications in physical, chemical and biological sensing. This is followed by a presentation of the advances in piezoelectric MEMS actuators for different application scenarios. Meanwhile, piezoelectric MEMS energy harvesters, with the ability to power other MEMS devices, are orderly enumerated. Furthermore, as a representative of piezoelectric resonators, Lamb wave resonators are exhibited with manifold performance improvements. Finally, the development trends of wearable and implantable piezoelectric MEMS devices are discussed.

engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
The Recent Progress of MEMS/NEMS Resonators

Lei Wei,Xuebao Kuai,Yidi Bao,Jiangtao Wei,Liangliang Yang,Peishuai Song,Mingliang Zhang,Fuhua Yang,Xiaodong Wang

DOI: https://doi.org/10.3390/mi12060724

IF: 3.4

2021-06-19

Micromachines

Abstract:MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing, micromechanical thermal analysis, quantum detection, and oscillators are introduced in detail. The material properties, resonance mode, and application in different fields such as gyroscope of the hemispherical structure, microdisk structure, drum resonator are reviewed. Furthermore, the working principles and sensing methods of the surface acoustic wave and bulk acoustic wave resonators and their new applications such as humidity sensing and fast spin control are discussed. The structure and resonance performance of tuning forks are summarized. This article aims to classify resonators according to different structures and summarize the working principles, resonance performance, and applications.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Development of in Situ Optical–electrical MEMS Platform for Semiconductor Characterization

Cai Songhua,Gu Chenyi,Wei Yifan,Gu Min,Pan Xiaoqing,Wang Peng

DOI: https://doi.org/10.1016/j.ultramic.2018.07.007

IF: 2.994

2018-01-01

Ultramicroscopy

Abstract:In situ transmission electron microscopy (TEM) technology has become one of the fastest growing areas in TEM research in recent years. This technique allows researchers to investigate the dynamic response of materials to external stimuli inside the microscope. Optoelectronic functional semiconducting materials play an irreplaceable role in several key fields such as clean energy, communications, and pollution disposal. The ability to observe the dynamic behavior of these materials under real working conditions using advanced TEM technologies would provide an in-depth understanding of their working mechanisms, enabling further improvement of their properties. In this work, we designed a microelectromechanical-system-chip-based system to illuminate a sample inside a transmission electron microscope. This system allows simultaneous in situ optical and electrical measurements, which are crucial for optoelectronic semiconductor characterization.

MEMS Developments in Tsinghua University

The Conception of MEMS and Current Development at Home and Abroat

Novel MEMS Devices for Information Systems

Research on Microelectron-Mechanical System and Its Application

Microelectromechanical System Technology and Its Application

The Study On Mems-Based Micro Pump Technology

Application of MEMS in Inertial Measurement

Emerging Technologies of Micro-Nanoelectromechanical Systems(mems/nems)

Towards the Integration of Nano/Micro Devices Using MEMS Technology

Medical Applications of MEMS

Microfabrication Technology of Three-Dimensional Microdevices and Their Mems Applications

Microelectromechanical systems (MEMS): fabrication, design and applications

PROGRESSES ON MICROMACHINED FLOW SENSORS BASED ON MEMS TECHNOLOGIES

Design and Fabrication for Inertial Micro Sensors

TECHNOLOGY OF SILICON-BASED MEMS

Rf Mems Activities at Imetu

Future of Microelectromechanical Systems (Mems)

Progress of Si-based MEMS Torsion Micromirror

Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

The Recent Progress of MEMS/NEMS Resonators

Development of in Situ Optical–electrical MEMS Platform for Semiconductor Characterization