MEMS Technology Status and Development Prospects

G. Yu.

Abstract:The development status,processing technologies and product markets of Micro Electro Mechanical Systems(MEMS) technology are introduced.The packaging technology and existing problems of MEMS product are mainly discussed,combining the MEMS materials and processing techniques,and the development prospects of MEMS technology are prospected.

Engineering,Materials Science

What problem does this paper attempt to address?

The Conception of MEMS and Current Development at Home and Abroat

刘文耀,杜君文,应济

DOI: https://doi.org/10.3969/j.issn.1002-2333.2001.02.002

2001-01-01

Abstract:The principle and relevant technology of GEMS are introduced. The current development of this technology at home and abroad and the prospect are also involved.
Research on Microelectron-Mechanical System and Its Application

Shi-xiang Jiang,Shi-qiang ZHU,Wen-sheng Huang

2001-01-01

Abstract:Theoretical and technical basis of MEMS are introduced.Future application of microelectron-machine to space,medicine,national defense and industries are listed in this paper.
A Review and Prospect of Power MEMS

甘霖,李伟,杨灿军,刘宜胜,宋瑞银,黎嘉杰

DOI: https://doi.org/10.3969/j.issn.1001-3881.2004.09.002

2004-01-01

Abstract:The research status of micro power source technology was introduced,the key technology of power MEMS was analyzed,and the future development was discussed.
Future of Microelectromechanical Systems (Mems)

MH Bao,WY Wang

DOI: https://doi.org/10.1016/0924-4247(96)01274-5

1996-01-01

Abstract:The development of microelectromechanical systems (MEMS) based on micromachining and microelectronics technologies has been significant for almost a decade. However, it is unrealistic to consider micromachining technology as a micro version of conventional machining technology. As a matter of fact, micromachining technology stemmed from the planar technology of silicon and is basically a two-dimensional processing technology. On the other hand, it is obvious that a micromachine cannot compare with a conventional machine in strength and power. For the successful development of MEMS in the future, a simple rule is suggested by the experience gained in the past few years: try to avoid as much as possible mechanical coupling with the outside world while trying hard to improve the MEMS technology to enhance the mechanical power of the devices. In addition to that, the strategy proven to be correct for the development of solid-state sensors also applies: MEMS devices should mainly be developed for new applications with a vast market. Their substitution for traditional applications should not be considered as a main strategy of development. Based on these arguments, the future development of MEMS devices and technologies is further discussed in the paper.
Status Quo and Developing Trend of MEMS-Gyroscope Technology

Yu Fei,Xiaolong Li,Wei Xiao

DOI: https://doi.org/10.1109/IMCCC.2015.159

2015-09-01

Abstract:With the rapid development of MEMS technology, MEMS-gyroscopes with its perfect characteristics of small size, light weight, low cost and environmental adaptability are getting a wild rang application including both civilian and military fields. At first, this paper introduces how the MEMS-gyroscope works from the basic mechanics, the internal structure and performance analysis of basic characteristics. And then the paper presents and analyzes the current status of the development of MEMS gyroscope technology. And based three different market conditions and working environments, the applications of MEMS gyroscopes are discussed in this paper. Finally, the developing trends of MEMS gyroscopes are analyzed from the technological and market perspectives.

Engineering,Materials Science
Advanced packaging technology for MEMS

王海宁,王水弟,蔡坚,贾松良

DOI: https://doi.org/10.3969/j.issn.1003-353X.2003.06.004

2003-01-01

Abstract:Some particularities for MEMS packaging:special signal interfaces, 3D-structureconfigurations, requirements of cases, passivation and reliability are summarized in this paper.Additionally, several advanced packaging techniques for MEMS: flip chip for MEMS packaging,multichip package and module MEMS are introduced. The research and development of MEMSpackaging should be strengthened.
Trends and frontiers of MEMS

Wen H. Ko

DOI: https://doi.org/10.1016/j.sna.2007.02.001

2007-05-01

Abstract:Since 1988, the MEMS has advanced from the early stage of technology development, device exploration, and laboratory research, to the mature stage of mass production and applications, as well as launched exploration and research in many new areas. For the trends of MEMS in the next 5–10 years, people with different background would have different views and projections. This article will present examples to illustrate the suggested future trends, as some of us see it.From the present MEMS orientation, the future trends of MEMS can be suggested as below:1.Transfer the traditional useful MEMS to large scale applications, to establish mass markets. This would build up MEMS industries to support the sustained MEMS research and development. There are two major directions: (A) Reduce cost, raise yield and efficiency to cultivate mass markets. (B) Raise system performance to meet the special needs.2.MEMS network. There are needs of having many different functional systems and many similar functional systems working together to perform required big tasks.3.New materials. Besides silicon and semiconductors, many other materials can be used for MEMS.4.Explore new frontiers. Many new Frontiers of research and application were developing. More will be open up. Such as: (A) biological research and medical instruments; (B) micro-energy sources—micro-fuel cells, environmental energy converters, remote energy supply techniques, etc.; (C) radio frequency and optical/IFR communication; (D) environmental monitoring, and protection; (E) ocean and water-way studies; (F) nano-micro-mixed technology.This article attempts to present the views of some MEMS educators and researchers in an over simplified form. It is hoping that this would stimulate more valuable discussions that may be valuable to planners of MEMS development and general readers.
MEMS vacuum packaging technology and applications

Jin, Y.,Wang, Z.F.,Lim, P.C.,Pan, D.Y.,jun wei,c k wong

DOI: https://doi.org/10.1109/EPTC.2003.1271534

2003-01-01

Abstract:Vacuum packaging is essential for various kinds of microelectromechanical system (MEMS) devices for enhancing the performance and reliability. This paper presents our works on research on vacuum packaging of MEMS devices. A hermetical sealing technique has been developed, which involves the processes of anodic bonding for silicon and glass wafers with imperfect interface, adhesive bonding, glass frit bonding and silicon-to-gold eutectic bonding. Vacuum maintenance has been achieved by applying evaporable and nonevaporable getter films in the packaging process. A specific helium leak detector with bombing system is introduced, which can monitor the deformation of micro diaphragms and conduct leak detection for MEMS structures.
Microelectromechanical System Technology and Its Application

张海涛,张斌

DOI: https://doi.org/10.3969/j.issn.1001-2028.2002.04.010

2002-01-01

Abstract:Microelectromechanical system (MEMS) technology makes it possible the moralization and integration of the products based on the material of silicon. This technology is divided into four categories: body, surface, metal and compound micromechanical processes. The basic technologies included in the micromechanical system are erosion, si-bond, multiplayer film sediment without stress, sacrifice layer, LIGA and the combined technologies based on them. The applications of micro-sensors, micro-machines, mechanism filter and resonant filters are presented, and the further development of technology is discussed.
Microelectromechanical systems (MEMS): fabrication, design and applications

Jack W Judy

DOI: https://doi.org/10.1088/0964-1726/10/6/301

IF: 4.1

2001-11-28

Smart Materials and Structures

Abstract:Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and systems on the scale of micrometers. Initially micromachining techniques were borrowed directly from the integrated circuit (IC) industry, but now many unique MEMS-specific micromachining processes are being developed. In MEMS, a wide variety of transduction mechanisms can be used to convert real-world signals from one form of energy to another, thereby enabling many different microsensors, microactuators and microsystems. Despite only partial standardization and a maturing MEMS CAD technology foundation, complex and sophisticated MEMS are being produced. The integration of ICs with MEMS can improve performance, but at the price of higher development costs, greater complexity and a longer development time. A growing appreciation for the potential impact of MEMS has prompted many efforts to commercialize a wide variety of novel MEMS products. In addition, MEMS are well suited for the needs of space exploration and thus will play an increasingly large role in future missions to the space station, Mars and beyond.

materials science, multidisciplinary,instruments & instrumentation
Emerging Technologies of Micro-Nanoelectromechanical Systems(mems/nems)

李志宏

DOI: https://doi.org/10.1360/112012-508

2012-01-01

Scientia Sinica Informationis

Abstract:The micro-nanoelectromechanical systems (MEMS/NEMS, herein called MEMS for simplicity), which the originate from microelectronics technology, can deal with the thermal, optical, magnetic, chemical, and biological variables. Various structures and devices can be fabricated on a chip through the integration technology. In the last few decades, MEMS has played increasingly important roles in aerospace, military, optical communication, wireless communication, biomedicine, etc., and MEMS products have been widely used in our daily lives. Due to the highly multidisciplinary nature, MEMS shows a diverse research and development trend. This report will discuss the status and trend of the development of MEMS fundamental research. The discussion will focus on the fusion of MEMS technology with integrated circuits, nanotechnology, and modern biotechnology. The strong intervention of the TSMC, the largest IC foundry in the world, in MEMS foundry industry greatly accelerates the pace of integration of MEMS and IC. More and more new nano-materials and nanofabrication technologies have been applied in MEMS technology to promote the performance and the emergence of new devices. On the other hand, NEMS technology provides new nanoscale three-dimensional processing approaches for novel CMOS devices, and spawns new types of IC devices, such as NEMS relays and nano-mechanical memories. The combination with the biotechnology becomes a new growth point of MEMS, where the exible electrode and circuit is one of the typical representatives.
MEMS Technology: A Review

Manish Kumar Mishra,Vikas Dubey,P. M. Mishra,Isharat Khan

DOI: https://doi.org/10.9734/jerr/2019/v4i116891

2019-02-18

Journal of Engineering Research and Reports

Abstract:This review article through light on a highly promising & demanding technology, which is set to revolutionize nearly every product category in present era, while discussing the Concept, Design & Development, Fabrication techniques and applications of micro electro-mechanical systems (MEMS) based Devices or systems. Microelectromechanical system discloses outstanding flexibility and adaptability in miniaturization devices followed by their compact dimension, low power consumption, and fine performance. The MEMS devices have numerous and very high potentials of creating a new field of applications for mobile equipment’s with increased flexibility & more reliability. This work deals with research carried out for the development of MEMS based sensors & Actuators and appropriate uses of MEMS. This work carries information’s regarding subsequent commercial and real life applications of MEMS and discusses various recent technological innovations carried out with their advantages & disadvantages. This work also describes the historical development of micro-electromechanical system (MEMS) sensor technology.
Materials issues in microelectromechanical devices: science, engineering, manufacturability and reliability

A.D Romig,Michael T Dugger,Paul J McWhorter

DOI: https://doi.org/10.1016/s1359-6454(03)00440-3

IF: 9.4

2003-11-01

Acta Materialia

Abstract:MicroElectroMechanical Systems (MEMS) technology offers considerable potential throughout the manufacturing sector, because of certain intrinsic advantages in terms of low cost, reliability, and small size. Relatively simple MEMS are used in applications ranging from automobile air bag sensors to electronic games. Considerably more complex devices have been designed for defense applications, for which government funding is available; however, the fledgling industry suffers from insufficient knowledge of materials physics at micrometer size and from the fact that currently commercialized MEMS devices are designed for specialized and rather disparate purposes, do not have a broad user base, and therefore have not generated industry standards or the design and process software that would be built upon those industry standards. In addition to industry standards, further advances in MEMS technology require a more complete understanding of the physics underlying performance and reliability. The first half of this paper reviews general issues related to fabrication and commercialization; the second half addresses the technical materials issues that relate to MEMS performance and reliability.

materials science, multidisciplinary,metallurgy & metallurgical engineering
Materials issues in microelectromechanical systems (MEMS)

S.M Spearing

DOI: https://doi.org/10.1016/s1359-6454(99)00294-3

IF: 9.4

2000-01-01

Acta Materialia

Abstract:Microelectromechanical systems (MEMS) have recently become an important area of technology, building on the success of the microelectronics industry over the past 50 years. MEMS combine mechanical and electrical function in devices at very small scales. Examples include pressure sensors, accelerometers, gyroscopes and optical devices, as well as chemical, biomedical and fluidic applications. The status of MEMS technology is reviewed with particular emphasis on materials issues therein. The materials issues in MEMS are divided into three categories, the MEMS material set, microfabrication processes, and material characterization and design. Each of these areas is addressed, with particular emphasis on the potential impact of materials solutions. A discussion of the future of MEMS and the role of materials in that future is given.

materials science, multidisciplinary,metallurgy & metallurgical engineering
TECHNOLOGY OF SILICON-BASED MEMS

郝一龙,张大成,李婷

DOI: https://doi.org/10.3969/j.issn.1671-7449.2002.z2.032

2001-01-01

Abstract:Concerning the development history of MEMS technology, the present paper introduces a state of the art developing direction of silicon based MEMS machining, indicating that there are two main developing directions. One is sacrificial layers technology, and the other is bulk micromachining. Sacrificial layers technology is developing towards multiple layers and integration. Bulk micromachining mainly includes combination of bonding and deep etching, pursuit to big mass and small stress, and three dimensional fabrications technology which is the developing direction of new body silicon technology. Standard process fabrication is becoming more and more important for MEMS study.
Novel MEMS Devices for Information Systems

Ren Tian-Ling

DOI: https://doi.org/10.1109/aprasc.2004.1422379

2004-01-01

Abstract:MEMS are paid more and more attention in the present information society. With the development of modern information technologies, information systems are becoming more compact, miniature and smart. MEMS devices and systems fit this trend well. The development and properties of MEMS technologies are reviewed. MEMS technologies are based on the technical inter-growing of microelectronics, materials science, mechanics, physics, chemistry, radio science, etc, and they have developed very fast from the very beginning. MEMS technologies are very promising for a wide range of information system applications. Some typical application examples are given.
Summary of Research Status and Application of MEMS Accelerometers

Shijiazhuang

DOI: https://doi.org/10.4236/JCC.2018.612021

2018-12-12

Abstract:The rapid development of MEMS technology has made MEMS accelerometers mature and the application range has been expanded. Many kinds of MEMS accelerometers are researched. According to the working principle of MEMS accelerometer, it can be divided into: piezoresistive, piezoelectric, capacitive, tunnel, resonant, electromagnetic, thermocouple, optical, inductive, etc. Due to its outstanding features in terms of size, quality, power consumption and reliability, MEMS sensors are used in military applications and where high environmental resistance is required. MEMS accelerometers are developing rapidly and have good application prospects. In order to make MEMS accelerometers more widely understood, the advantages of MEMS accelerometers are expounded. The research status of MEMS accelerometers is introduced, and MEMS are analyzed. The application of accelerometers in real-world environments, and the development trend of MEMS accelerometers in the future. More scholars will invest in MEMS accelerometer research, pursuing high performance, low power consumption, high precision, multi-function, and interaction. Strong MEMS accelerometers will be ubiquitous in the future.

Materials Science,Engineering,Chemistry
Microsystem Product Development

M. -A. Polosky,E. -J. Garcia,M.-A. Polosky,E.-J. Garcia

DOI: https://doi.org/10.48550/arXiv.0711.3274

2007-11-21

Other Computer Science

Abstract:Over the last decade the successful design and fabrication of complex MEMS (MicroElectroMechanical Systems), optical circuits and ASICs have been demonstrated. Packaging and integration processes have lagged behind MEMS research but are rapidly maturing. As packaging processes evolve, a new challenge presents itself, microsystem product development. Product development entails the maturation of the design and all the processes needed to successfully produce a product. Elements such as tooling design, fixtures, gages, testers, inspection, work instructions, process planning, etc., are often overlooked as MEMS engineers concentrate on design, fabrication and packaging processes. Thorough, up-front planning of product development efforts is crucial to the success of any project.
Silicon-Based Mems Process and Standardization

YL Hao,DC Zhang

DOI: https://doi.org/10.1109/icsict.2004.1435192

2004-01-01

Abstract:This paper, reviewing the development history of MEMS technology, summarizes the developing trend of current MEMS fabrication techniques. To realize the miniaturization and 3D fabrication of MEMS device, multi-layer techniques, SOI techniques and integration are the main developing directions of current MEMS. Standardization is an important tool of MEMS research and the standardization process covers two platforms: the soft platform and the hard platform, which will exert relatively large driving forces to MEMS device research.

MEMS Technology Status and Development Prospects

The Conception of MEMS and Current Development at Home and Abroat

Research on Microelectron-Mechanical System and Its Application

A Review and Prospect of Power MEMS

Future of Microelectromechanical Systems (Mems)

Status Quo and Developing Trend of MEMS-Gyroscope Technology

Advanced packaging technology for MEMS

Trends and frontiers of MEMS

MEMS vacuum packaging technology and applications

Microelectromechanical System Technology and Its Application

Microelectromechanical systems (MEMS): fabrication, design and applications

Emerging Technologies of Micro-Nanoelectromechanical Systems(mems/nems)

MEMS Technology: A Review

Materials issues in microelectromechanical devices: science, engineering, manufacturability and reliability

Materials issues in microelectromechanical systems (MEMS)

TECHNOLOGY OF SILICON-BASED MEMS

Novel MEMS Devices for Information Systems

Summary of Research Status and Application of MEMS Accelerometers

Microsystem Product Development

Silicon-Based Mems Process and Standardization