Micro Electromagnetic Actuator For Micropump

Ql Gong,Zy Zhou,Yh Yang

1999-01-01

Abstract:The paper presents the structure design of a micro electromagnetic micropump as well as its actuator. Based upon theoretical mechanics modeling and numerical calculation, micro actuator's mechanical structure and electromagnetic force were figured out. Some optimizations were also investigated in the paper.

What problem does this paper attempt to address?

Research and Fabrication of a Low-Cost Valveless Micropump Based on Piezoelectric Actuation

XU Liang,YING Ji,LI Jun

DOI: https://doi.org/10.3969/j.issn.1000-9787.2011.03.031

2011-01-01

Abstract:A low-cost valveless micropump based on piezoelectric actuation is presented.The optimized value of opening angle is obtained by numerical simulation,which is the reference of design parameters of the diffuser/nozzle element.A 300 μm depth of pump chamber substrate and a 100 μm depth of cover are fabricated on pyrex glass using photographic and wet chemical etching processes.Then,by using plasma cleaning technology,they are bonded to PDMS membrane to accomplish the fabrication of the micropump.The maximum flow rate and backpressure of the pump are about 436 μL/min and 620 Pa when applying a 100V square wave driving voltage at 110 Hz across the piezoelectric-disc.
Coupled Electrostatic-Structures-Fluidic Analysis of a Nozzle/Diffuser Diaphragm Micropump

JinXin Dong,XieZhao Lin,Ji Ying

DOI: https://doi.org/10.4028/www.scientific.net/amr.317-319.1609

2011-01-01

Advanced Materials Research

Abstract:Micropump is the key component in the micro total analytical system. The major technical impediment in improving the performance of this micro-device lies in the lack of understanding the physical phenomena and their interactions of electric, mechanical, and fluidic fields for performing their intended functions. Because of the complexity of the micropump, the full coupled numerical analysis is extremely needed. This paper presents for the results of such fully coupled simulations. CFDRC® was used for the transient analysis of an electrostatically actuated micropump. The results show that the dynamic characteristics of fluid in the micropump and the vibration of flexible diaphragm are highly interactive each other. The flow rectification of the nozzle/diffuser will work only after the pressure difference between the two ends of valve have reached at a critical value. In the pump chamber, the fluidic press distribution almost independent of the space variation. Due to the increasing demands for accuracy, the nonlinear features of viscous loss of the fluid can no longer be neglected or simplified, but have to be taken into account in detail.
Modeling and Simulation of Electrostatic Micropump Based on MEMS

李俊,应济,周良兴

DOI: https://doi.org/10.3785/j.issn.1006-754x.2009.01.013

2009-01-01

Journal of Engineering Design

Abstract:Electrostatic micro-pump based on MEMS is modeled by FEA.The modeling of coupled-field electrostatic micro-pump involved in multi-physics is reasonably simplified in simulation.In static analysis,small deflection theory of circular plate and electrostatic actuating theory are adopted to simulate electrostatic-structural coupled process.In modal analysis,harmonic response analysis and nonlinear transient dynamic analysis of pump membrane,the fluid in the pump is regarded as an additional mass acting on the pump membrane to approximately substitute the effect of fluid field on pump membrane,which reduces the amount of calculation and improves simulation efficiency.
Design, optimization and simulation on microelectromagnetic pump

Qiulian Gong,Zhaoying Zhou,Yihua Yang,Xiaohao Wang

DOI: https://doi.org/10.1016/S0924-4247(99)00384-2

2000-01-01

Abstract:A four-layer electromagnetic micropump was designed, and its static and dynamic characters were studied from elements to full system. The mechanical model of the electromagnetic actuator was established, and some its geometric structural parameters were then optimized. The deflection of the pump membrane caused by the varying local magnetic driving forces was analyzed in particular by ANSYS FEM. Fluid theory and experiment data were used to analyze the microvalve. Full system model of the micropump and its differential equations were set up on the basis of physical liquid transmission procedure and system function block. Pulse and periodic pulse driving current responses were evaluated. The flow-frequency characteristic shows that the most effective driving frequency is 125 Hz. The effect of driving signal duty cycle and microvalve flow resistance was studied. The transfer function of this full system of micropump was also discussed.
STUDY ON THERMAL ACTUATED MICROPUMP

YIN Zhizhong,HU Weilin,GUO ZengYuan

DOI: https://doi.org/10.3321/j.issn:0253-231x.2000.02.017

2000-01-01

Journal of Engineering Thermophysics

Abstract:Micropump used as actuator of microfluid device is an important part of micro－ electro－ mechanical systems (MEMS). The micropump was simulated as whole to optimize the work condition. Simulation results were presented for the flow rate versus frequency and the efficiency versus frequency. The simulation results show that the micropump has a maximum flow rate at 4－ 5 Hz, if the input power is greater than 2W the flow rate does not increase markedly, the micropump show the highest efficiency 32.54μ l/min· W at 1W as input power and 5Hz as input frequency.
Modeling of a micropump membrane with electrostatic actuator

Liwei Li,Rong Zhu,Zhaoying Zhou,Jianxing Ren

DOI: https://doi.org/10.1109/ICACC.2010.5486794

2010-01-01

Abstract:As a kind of fluid delivering device, micropumps usually employ flexible structure such as flexible membrane to force fluid flowing. It is necessary to predict the motion of flexible structure so as to control the micropump performance. In this paper, the principle of micropump using an electrostatic actuator has been introduced. According to the thin plate elastic theory, the bending motion of electrostatic-flexible membrane has been modelled. Based on Rayleith-Ritz method, the solution for harmonic vibration of flexible membrane has been derived. A calculation example of resonance frequency of silicon electrostatic actuating membrane has been carried out. And the result calculated from such model agree with that by means of finite element method. It indicates that the analyzation model is appropriate and applicable. All analyzations provide theoretical foundation for the controlling of MEMS actuators.
Research on function experiment of electromagnetism driven micropump

CUI Jian-guo,HOU Wen-sheng,ZHENG Xiao-lin,ZHUANG Yin-pin

DOI: https://doi.org/10.3969/j.issn.1000-9787.2009.02.003

2009-01-01

Abstract:The design,fabrication and characterization of electromagnetism driven micropump based on the principle of electromagnetic field are presented.The micropump includes in/out liquid tube,diffuse/nozzle,membrane,chamber,electromagnetism coil and permanent magnet.The dimension of micropump is about  11 mm×4 mm.The micropump chamber is round with diameter of 5 mm and depth of 2 mm.The function testing of micropump is carried out by using orthogonality experiment method.The maximum flow rate of the micropump is 0.21 mL/min under 4 V,5 Hz square wave power supply and 6 μm of membrane.
Design and Fabrication Process of Electromagnetically Actuated Valveless Micropump with Two Parallel Flexible Diaphragms

Su Yufeng,Chen Wenyuan,Cui Feng,Zhang Weiping

DOI: https://doi.org/10.1007/s00170-005-0030-0

IF: 3.563

2005-01-01

The International Journal of Advanced Manufacturing Technology

Abstract:A parallel dynamic passive valveless micropump was designed, which consists of three layers—valve, diaphragm and electromagnetic coil. The valve was wetly etched in a silicon wafer, the diaphragm was a PDMS (polydimethyl siloxane) film spun on a silicon wafer with embedded permanent magnet posts, and the coil was electroplated on a silicon substrate. Under the actuation of the magnetic field generated by coils, the flexible diaphragm could be displaced upwards and downwards. After analyzing magnetic and mechanical characteristic of the flexible membrane and direction-dependence of the nozzle, a micropump was designed. And the relative length (L/d) of the micropump nozzle was taken 4. A 7 × 7 array of permanent magnetic posts was embedded in the PDMS film. Two diaphragms worked in an anti-step mode, which could relieve the liquid shock and increase the discharge of the micropump. The ANSYS® and Matlab® were adopted to analyze the actuation effect of the coil and the flow characteristic of the micropump. Results show that when actuated under a 0.3 A, 100 Hz current, the displacement of the diaphragm is more than 30 μm, and the discharge of the micropump is about 6 μL/s.
Study on Micro-Electromagnetic Force in Electromagnetic Microactuator

Wen Li

2002-01-01

Abstract:An electromagnetic microactuator applied in micro electro mechanical systems was designed. The device consists of a square planar coil, a spring support structure, and permalloy magnet film. The microactuator was successfully fabricated by micromachining technology. The main advantage of the microactuator is its capability of providing higher forces over relatively large distance. Micro electromagnetic force between the planar coil and the permalloy magnet film was studied. The micro electromagnetic force was also simulated by finite element software ANSYS.
Thermally Actuated Membrane Micropump

YINZhizhong,PANGJiangtao,LIULitian,HUWeilin,GUOZengyuan

DOI: https://doi.org/10.3321/j.issn:1000-0054.2000.06.011

2000-01-01

Abstract:Micropumps used as actuators of microfluid devices are an important part of micro electro mechanical systems (MEMS). Three main parts of a thermally actuated membrane micropump were analyzed, then the micropump was simulated as whole. Simulation results were presented for the flow rate versus frequency, pressure head and input power. The simulation results show that the micropump has a maximum flow rate at 3.33Hz, the pressure head can rise to 64kPa at zero flow rate and the flow rate increases rapidly with input power because of the buckling effect. The simulation results agree well with experimentally measured flow rates measured as a function of driving frequency and input power.
Simulation and optimization of dynamic passive valve micropump

weiping zhang,wenyuan chen,xiaomei chen,xiaosheng wu,zhengfu xu

DOI: https://doi.org/10.1117/12.483187

2002-01-01

Abstract:Dynamic passive valve micropump is a kind of PZT actuation, valveless micropump which has higher working frequency, high reliability, simple structure, low cost. It can easily match many kinds of requirement in application. Some rnicropumps have been fabricated in our laboratory. The performance of dynamic passive valve micropump is in close relationship with structural parameters such as diffuser's aperture angle, diffuser's channel length, diffuser's channel smallest cross-section diameter. At the same time, its performance also depends on the fluid's Reynolds number and the working frequency of PZT actuation as well. In this paper, firstly we give the relationship between the performance of the micropurnp and these parameters. Then we build a micro hydrodynamic model of micro pump by the finite element method. In this model, we take the coupling of fluid in micro chamber and two micro valves into consideration. The restriction of micro fabrication is also considered. By simulation and computation, we obtained the fluid status such as laminar flow, turbulent flow. We also get the fluid motion status such velocity of flow, the direction of the current. By some calculation, we gain the flux of micropump. Based on these results, one optimization design of micropump is attained. And according to this design, we fabricated and assembled some samples of dynamic passive micropump.
Research on Performance of Magnetic Power Driven Micropump

Xitian Pi

2010-01-01

Abstract:Based on the electromagnetic theory,a magnetic power driven micropump is designed and developed.The dimension of this micropump is Φ11 mm×4 mm.The diameter of micropump chamber is 5 mm,and the depth is 2 mm.Through checking out the experiment data with variance analysis method,the validity of performance parameters of the micropump is verified.To decrease the micropump size and simplify the control mode and peripheral circuit,single and dual power comparison experimental study is conducted,and the experimental result is good.
Design and Fabrication of A Microelectromechanical Systems Polymeric Micropump

Yi Luo,Xianglong Yin,Xiaodong Wang

DOI: https://doi.org/10.1177/1740349913490514

2013-01-01

Abstract:This article introduces a polymeric micropump actuated by a PbZrTiO3 (lead zirconate titanate) bimorph. The pump body was made of polymethyl methacrylate substrate, and the passive valves were fabricated by SU-8 lift-off technique. First, the vibration performances of parts including lead zirconate titanate, membrane and valve were analyzed by finite element model. Then, the valve unit was assembled by ultrasonic bonding. An energy director was designed on the valve deck to realize precise positioning of the valve components. Finally, the flow performance of the micropump was studied by frequency-sweeping experiments, and the experimental results approximately coincided with the finite element model analysis. Under the driving frequency of 550 Hz and voltage of 210 V (peak–peak), the maximum flow rate reached 18.2 mL/min. This study provides an effective and a reliable way to fabricate polymeric micropumps.
Micro Electromagnetic Actuator with High Energy Density Based on MEMS Technology

ZHANG Tao,WU Yi-hui,LI Hai-wen,LIU Bo,ZHANG Ping,WANG Shu-rong

DOI: https://doi.org/10.3321/j.issn:1004-924x.2007.06.011

2007-01-01

Optics and Precision Engineering

Abstract:A fabricating technology for high energy density micro electromagnetic actuator based on Micro Electron Mechanics System(MEMS) is introduced.The main steps on MEMS technology are as follows: Firstly,etching plating trenches of multi-turn double planar microcoils and permalloy(NiFe) core into silicon wafers prior to electrode position,a seed layer of copper must is deposited on the wafer;secondly,when the thick of seed layer reaches to about 20 μm by electroplating,peeling the surface plating on the wafer and coating the core by photoresist,electroplating the coil in the groove;thirdly,when the coil groove is filled with copper,coating the coils and electroplating permally core.In the 10 mm×10 mm×0.38 mm square silicon wafer,a high energy density electromagnetic microactuator,composed of multi-turn double planar microcoils(22×2 turns,section of copper wire is 60 μm×60 μm,length is 1 164 mm) and permalloy core(3 mm×3 mm×0.2 mm),is fabricated.Finally,the estimated force produced by the integrated electromagnetic microactuator is around 50 mN at a sinusoidal current amplitude of 0.3 A,which is fabricated and tested on the valveless micropump.Experiment results show the microactuator is efficient in producing large magnetic force and flexible in application.
Simulations and Analysis of a Piezoelectric Micropump.

Baowei Wang,Xiangcheng Chu,Enzhu Li,Longtu Li

DOI: https://doi.org/10.1016/j.ultras.2006.05.018

IF: 4.2

2006-01-01

Ultrasonics

Abstract:A number of micropumps have been proposed in the last few years based on different actuating principles and fabricated by different technologies. However, many of those micropumps have been designed taking into account primarily available microfabrication technologies rather than appropriate pump performance analysis. In fact, not all papers are available in the literature presenting theoretical models usable to describe the functioning and predict the performance of those micropumps. In this paper, we present a new micropump model and FEA method suitable for guiding the design and predicting the performance of a micropump actuated by a piezoelectric actuator. The model takes into account the influence of piezoelectric transducer and pump geometry. Simulations have been performed and compared with results of experiments on a prototype micropump fabricated in our laboratory.
Dynamic Model and Virtual Operation of Micropump

ZHAO Xin,WANG Kai,LU Gui-zhang,TAN Yi-yong

DOI: https://doi.org/10.3969/j.issn.1007-4252.2006.04.015

2006-01-01

Abstract:Based on the device dynamic model,virtual operation was built to show direct relation of MEMS device design parameters and operation. Static model of micropump was studied including membrane and micropump.By identifying groups of data from finite element analysis,the static model of membrane is established.Then,analytical expression of microvalve deformation shape with design parameters is derived.Based on the static model,the dynamics of micropump operation are obtained from the inadequate physical experiment data by analyzing the operation mechanism.Micropump virtual operation is implemented in virtual environment,and it has fairly high accuracy by being compared with the experiment results.
Design And Fabrication Of An Ipmc Actuated Micro-Pump With Inner Petal-Shaped Diaphragm

Yanjie Wang,Chun Zhao,Jiale Wang,Zicai Zhu,Denglin Zhu,Minzhou Luo

DOI: https://doi.org/10.1109/ICARM.2018.8610829

2018-01-01

Abstract:As a key fluid controlled component, micropumps have been widely used in the fields of electronics and biology. The core of pumping-system is made of an actuating diaphragm, closed cavity body and valve, in which diaphragm plays a more vital role. As a promising material candidate for micropump actuating diaphragm, Ionic polymer-metal composites (IPMC) can produce a linear stroke under low input voltages by reasonable shape design (general 3V). In this paper, we integrate an inner petal shaped IPMC as an actuating diaphragm into micropump to achieve fluid migration. First, we separately fabricated 8 petal-shaped IPMC actuators with the dimension of 1.0cm, 1.5cm and 2.5cm in diameter. And then we measured their electromechanical responses under 1-3V DC and AC voltage, respectively. After that, we assembled the micropump prototype with pump body by 3D printing technology and the petal-shaped IPMC diaphragm, and performed experimental characterization of the prototype. The experimental results revealed that the circular inner petal-shaped IPMC actuator with 25 mm in diameter produces a maximum deflection up to 0.7 mm at 3V DC voltage. When the voltage amplitude rises from 0.5V to 3V at 1Hz sinusoidal, the flow rate varied from 162 L/min to 1611 L/min, and back pressure reached up to 71mm-H2O.
Design and Research of the One-Way Microsphere Valve and the PDMS Film Electromagnetic Micropump

Miao Xiaodan,Lu Hongguang,Chen He,Liu Shihai

DOI: https://doi.org/10.1007/s10404-022-02571-x

2022-01-01

Microfluidics and Nanofluidics

Abstract:A novel PDMS film electromagnetic micropump with one-way microsphere valve is proposed in this paper. The one-way microsphere valve was adopted to avoid the backflow phenomenon, since the fluid could only move in one direction by using the annular block above or below the microsphere. Based on the analysis of the couple effect between the magnetic field and the deformation of the PDMS membrane, considering the variation of the fluid in the micropump, the important parameters of the micropump were optimized, such as the output flow rate and the backpressure. Then, the micropump was assembled by the the NdFeB permanent magnet, the PDMS film, the micropump body, the solenoid coil and the ceramic microsphere vale.At last, both the simulation and measurement results indicated that the maximum output flow rate and the maximum output backpressure are 8915.84 μl/min and 356.72 pa, at 2.5 A and 25 Hz.
Parametric Design and Experiment Research on a Valveless Micropump

严鲁涛,袁松梅,刘强

DOI: https://doi.org/10.3969/j.issn.1004-2474.2009.03.026

2009-01-01

Abstract:This paper described a piezoelectric valveless micropump developed to be the key devices of microfluids, the prototype of the micropump had been designed and manufactured. The vibration modes and the best work frequency were obtained by means of Finite Element Method. According the experimental results, the characteristic relations about excitation voltage and actuation frequency to the flux of micropump were verified. The experimental results demonstrated that the micropump was suitable for microfluids manipulation with many advantages, such as simple structure, low price, high reliability and so on.
Design of a novel piezoelectric micropump structure

Zhao-xin GENG,Da-fu CUI,Hai-ning WANG,Chang-chun LIU

DOI: https://doi.org/10.3969/j.issn.1000-9787.2006.12.028

2006-01-01

Abstract:Micropump has a large potential for an application to microchemical analysis systems and much attention has been given to develope micropump.Through studying the micropump and microvalve used in microfluidic control chemical analysis from the design of structure,working principle and fabrication process,a novel piezoelectric-driven integrated microump and microvalve is developed.The construction and the fabrication process is quite simple.It consists of flexible PDMS pump diaphragm,base plate and piezo electric actuator.PDMS diaphragm,meanwhile,is a active valve whose functions are manipulating/directing/switching the flow direction(forward or backward),and is a buffer element too.This device can work as a active valve when driving the piezoelectric actuator by a DC-voltage,and can work as micropump when driving the displacement unit in a square-wave manner.The geometry parameter,work principle and process of fabrication are given in detail.

Micro Electromagnetic Actuator For Micropump

Research and Fabrication of a Low-Cost Valveless Micropump Based on Piezoelectric Actuation

Coupled Electrostatic-Structures-Fluidic Analysis of a Nozzle/Diffuser Diaphragm Micropump

Modeling and Simulation of Electrostatic Micropump Based on MEMS

Design, optimization and simulation on microelectromagnetic pump

STUDY ON THERMAL ACTUATED MICROPUMP

Modeling of a micropump membrane with electrostatic actuator

Research on function experiment of electromagnetism driven micropump

Design and Fabrication Process of Electromagnetically Actuated Valveless Micropump with Two Parallel Flexible Diaphragms

Study on Micro-Electromagnetic Force in Electromagnetic Microactuator

Thermally Actuated Membrane Micropump

Simulation and optimization of dynamic passive valve micropump

Research on Performance of Magnetic Power Driven Micropump

Design and Fabrication of A Microelectromechanical Systems Polymeric Micropump

Micro Electromagnetic Actuator with High Energy Density Based on MEMS Technology

Simulations and Analysis of a Piezoelectric Micropump.

Dynamic Model and Virtual Operation of Micropump

Design And Fabrication Of An Ipmc Actuated Micro-Pump With Inner Petal-Shaped Diaphragm

Design and Research of the One-Way Microsphere Valve and the PDMS Film Electromagnetic Micropump

Parametric Design and Experiment Research on a Valveless Micropump

Design of a novel piezoelectric micropump structure