Micro Electromagnetic Actuator with High Energy Density Based on MEMS Technology

ZHANG Tao,WU Yi-hui,LI Hai-wen,LIU Bo,ZHANG Ping,WANG Shu-rong

DOI: https://doi.org/10.3321/j.issn:1004-924x.2007.06.011

2007-01-01

Optics and Precision Engineering

Abstract:A fabricating technology for high energy density micro electromagnetic actuator based on Micro Electron Mechanics System(MEMS) is introduced.The main steps on MEMS technology are as follows: Firstly,etching plating trenches of multi-turn double planar microcoils and permalloy(NiFe) core into silicon wafers prior to electrode position,a seed layer of copper must is deposited on the wafer;secondly,when the thick of seed layer reaches to about 20 μm by electroplating,peeling the surface plating on the wafer and coating the core by photoresist,electroplating the coil in the groove;thirdly,when the coil groove is filled with copper,coating the coils and electroplating permally core.In the 10 mm×10 mm×0.38 mm square silicon wafer,a high energy density electromagnetic microactuator,composed of multi-turn double planar microcoils(22×2 turns,section of copper wire is 60 μm×60 μm,length is 1 164 mm) and permalloy core(3 mm×3 mm×0.2 mm),is fabricated.Finally,the estimated force produced by the integrated electromagnetic microactuator is around 50 mN at a sinusoidal current amplitude of 0.3 A,which is fabricated and tested on the valveless micropump.Experiment results show the microactuator is efficient in producing large magnetic force and flexible in application.