A novel MEMS electromagnetic energy harvester with series coils

Zhongliang Li,Meng Di Han,Haixia Zhang
DOI: https://doi.org/10.1109/Transducers.2013.6627251
2013-01-01
Abstract:A novel MEMS electromagnetic energy harvester with series coils was designed, fabricated and tested. The magnetic properties of permanent magnets were analyzed by MAXWELL and we enhanced magnetization through magnet arrays. An integrated method to fabricate permanent magnet was applied for fabrication, this MEMS compatible fabrication processes not only increased the production efficiency but also condensed the device's volume to 2.72 mm3. The new structure with series coils improved the output voltage to 0.98 mV at resonant frequency 48 Hz and the power density can be 5.52 uW/cm3. © 2013 IEEE.
What problem does this paper attempt to address?