A Silicon MEMS EM vibration energy harvester

Y. Yang,U. Radhakrishna,D. Ward,A. P. Chandrakasan,J. H. Lang
DOI: https://doi.org/10.1088/1742-6596/1407/1/012022
2019-10-05
Abstract:This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched silicon suspension, and pick-and-place N42 NdBFe magnets and copper coils, housed in a 3D-printed package. The harvester is designed to operate near 50 Hz with 0.5-1 g vibrations using a long-stroke suspension. Multi-domain harvester optimization results in an open-circuit voltage of 1.7 V, a matched-load power output of 2.2 mW, and a matched-load power-output density of 1.23 mW/cm3 at 1.1 g with a resonance frequency of 76.3 Hz.
Applied Physics,Signal Processing,Systems and Control
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