Comparing research on two different numerical models of electrostatically actuated valveless micropump

Xie-zhao LIN,Ji YING,Zi-chen CHEN
2010-01-01
Abstract:To improve the performance of electrostatically actuated valveless micropump, simulation of its dynimic characteristics have been conducted by full electrostatic-mechanic-fluidic coupled model (CFM) and prescribed deformations model (PDM) respectively. By comparing the calculated results of diaphragm deflections, transient variations of central displacements, chamber pressures and flow rate of inlet/outlet, it can be concluded that the PDM has lower cost and inadequate precision, but some distorting dynamic characteristics may be resulted from; The FCM can predict the transient behaviors of the micropump quite well since the effects of electro-mechanical coupling and fluid-structural interaction have been considered, but the computation cost is much more expensive.
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