Investigation of microvalve based on microelectromechanical systems

Zhang Xizhe,Tang Zhouqiang,Han Xianwei,Guan Haibing,Huan Fei
DOI: https://doi.org/10.3969/j.issn.1672-9374.2010.01.002
2010-01-01
Abstract:According to the status and development trend of MEMS and microvavle technology, the concepts of staticelectricity and piezoelectricity microvavle have been demonstrated by the theoretical analyzing and numerical simulation based on the actuating analysis and performance comparison of the microvalve. The major technical and performance parameters have been determined. The prototype of the piezoelectricity microvalve was fabricated followed the structure design and MEMS technics research. Performance of the prototype has been tested. The result shows that the design of the MEMS piezoelectricity microvalve is reasonable, and the microvalve with high performance would be obtained through fabrication optimization and MEMS technics study.
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