Research Progress of Inchworm Actuator with MEMS Teeth

张兆成,胡泓

DOI: https://doi.org/10.3969/j.issn.1004-7018.2008.10.019

2008-01-01

Abstract:The latest research progress and applications of inchworm actuator with MEMS teeth were presented comprehensively.This configuration had lager output force,high power density and high frequency characteristics.This configuration will become an important one of high performance precision linear actuators.

What problem does this paper attempt to address?

Research Progress of Inchworm Actuator with Clutch Clamping Mechanism

张兆成,胡泓

DOI: https://doi.org/10.3969/j.issn.1001-6848.2009.07.018

2009-01-01

Abstract:Inchworm actuators are classified by the clamping mechanism.The clamping mechanism of inchworm actuators possesses four developing types:active clamp,wedge clamp,wedge roller clamp and nut-screw clamp.Pointed out the shortcomings of traditional active clamp,also presented the advantages and disadvantages of wedge clamp and wedge roller clamp.Introduced the characteristics and future research directions of nut-screw clamp,Made a conclusion based on the development process.This kind of inchworm actuator will become an important one of high performance precision linear actuators.
Experimental Research on Output Performances of Giant Magnetostrictive Actuator

LI Guo-ping,CHEN Zi-chen

2007-01-01

Abstract:The paper introduces the performances of magnetostrictive actuators and its applications,discusses the design methods for the structure and internal magnetic circuit of a giant magnetostrictive actuator,and makes tests on the output displacement and force characteristics for an actuator using homemade magnetostrictive material.The experimental result shows that the actuator has satisfactory output precisions and ranges in transient and stable states,and can be used in low-frequency vibration control system of precise equipment.
Research Advances of Improving Thrust Power of Inchworm-Type Piezoelectric Linear Actuators

张兆成,胡泓

DOI: https://doi.org/10.3969/j.issn.1004-7018.2009.12.020

2009-01-01

Abstract:Inchworm-type piezoelectric linear actuators have large displacement and high resolution,but the mechanism of system output force depending on the static friction of clamping mechanism limits the system stiffness and output thrust.The inchworm actuators were classified according to the structure type and actuation type of clamping mechanism and the cross-application with new materials or new technologies,and several classical inchworm actuators were introduced.In order to improve the thrust power several valuable research directions were presented.
Development and Application of Inchworm-Type Piezoelectric Linear Actuator

张兆成,胡泓

DOI: https://doi.org/10.3969/j.issn.1004-7018.2009.03.018

2009-01-01

Abstract:The present situation of the research and development of piezoelectric inchworm actuator was introduced,and some typical examples were given.The domains of application of piezoelectric inchworm actuator were described.In the end,the problems and key techniques of piezoelectric inchworm actuator on aspects of design,materials and control etc.were pointed out in this paper.
Development and Experiment Evaluation of a Compact Inchworm Piezoelectric Actuator Using Three-Jaw Type Clamping Mechanism

Jie Deng,Shijing Zhang,Yiqing Li,Xuefeng Ma,Xiang Gao,Hui Xie,Yingxiang Liu

DOI: https://doi.org/10.1088/1361-665x/ac59da

IF: 4.1

2022-01-01

Smart Materials and Structures

Abstract:A compact inchworm piezoelectric actuator using three-jaw type clamping mechanism is developed in this study. Different from the previous inchworm piezoelectric actuators constructed with guiding structures, the proposed actuator can drive an output shaft to realize linear motion without other auxiliary structures based on the automatic centering and guidance functions of the designed three-jaw type clamping mechanism, and a compact structure is obtained. The configuration of the actuator is presented to describe the operating principle in detail. Then the structures of the clamping and actuating units are designed by the assistance of finite element simulations. A prototype is fabricated and a compact structure is achieved with outer diameter of 34 mm and length of 40 mm. The experiments are performed to investigate the characteristics, a maximum speed of 155.5 μm s−1 and a thrust force of 12.3 N are achieved. The experimental results confirm that the proposed inchworm actuator can achieve a compact structure by adopting the designed three-jaw type clamping mechanisms, it has great potential in integration with precision equipment, which is conductive to apply in the fields of biological manipulation robots and aerospace devices.
A piezoelectric inchworm actuator of linear type using symmetrical lever amplification

Li Ma,Jintao Xiao,Shasha Zhou,Lining Sun

DOI: https://doi.org/10.1177/1740349914531567

2014-04-30

Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems

Abstract:Piezoelectric inchworm actuators have a wide application in the field of nano-positioning and ultra-precision detecting instruments. Ultra-precision positioning equipments are urgently needed in the field of precision optics. A new piezoelectric linear actuator, based on inchworm motion principle, with a symmetry lever displacement amplification mechanism has been designed in this article. The whole structure adopts uniaxial-type double-notch right circular flexible hinge as its main hinges, which offers the driving part a larger displacement and makes clamping part have enough clamping force at the same time. High-precision cross roller guide ways are utilized to improve the positioning accuracy of the actuator. Both theoretical analysis and finite element analysis of clamping mechanism and driving mechanism have been carried out. An experimental test platform has been built, and a controlling program of the actuator is compiled by LabVIEW. The experimental results show that the working stroke of the actuator is ± 25 mm, resolution is 60 nm, the clamping force is 17 N, and the bearing capacity is 11 N; the actuator has a highest speed of 1.259 mm/s at the driving voltage 150 V.
A Compact Inchworm Piezoelectric Actuator with High Speed: Design, Modeling, and Experimental Evaluation

Xuefeng Ma,Yingxiang Liu,Jie Deng,Xiang Gao,Jianfei Cheng

DOI: https://doi.org/10.1016/j.ymssp.2022.109704

IF: 8.4

2022-01-01

Mechanical Systems and Signal Processing

Abstract:Inchworm piezoelectric actuators are usually composed of three or more piezoelectric stacks, which makes their structures and circuits sophisticated. Although a variety of inchworm piezoelectric actuators driven by fewer piezoelectric stacks have been proposed to realize the simplification of the traditional structures. It is still difficult to inherit the advantage of large output force and achieve high output speed without backward motion for a simplified inchworm actuator. Here, we present a compact inchworm piezoelectric actuator with two multi-function driving feet, in which only two piezoelectric stacks are utilized. The deformations of the driving feet are utilized efficiently by the proposed working principle, and four steps in each cycle are realized, which improve the output speed of the proposed actuator. The stiffness optimization is carried out to obtain a stable step characteristic and a high output force. Under a voltage of 150 V and a frequency of 50 Hz, the actuator achieved a maximum speed of 2081.16 mu m/s, a carrying load larger than 6.442 kg and an output force of 14 N. Furthermore, this actuator also achieved a stable step process without backward motion under a carrying load of 6.442 kg.
Design and experimental evaluation of an inchworm motor driven by bender-type piezoelectric actuators

Shuo Han,Zhi Li,Yunlang Xu,Xiaofeng Yang

DOI: https://doi.org/10.1088/1361-665X/ac93d2

IF: 4.1

2022-01-01

Smart Materials and Structures

Abstract:Piezoelectric actuators (PEAs) are widely used in ultra-precision detection platforms where nano-precision and non-magnetic features are required. With the development of the semiconductor industry, actuators develop toward the tendency of smaller size, higher precision, and longer travel. However, these demands are difficult to meet merely by virtue of a single piezoelectric actuator or a simple structured inchworm piezo motor, which makes it necessary to develop a new drive mode following a different drive principle. In this paper, a novel inchworm piezo motor with bender-type PEAs in phalanx distribution was proposed, which facilitates in reducing the dimension of the motor and enhances the performance and stability of the piezo motor. For the purpose of accommodating the bender-type PEAs and providing the preloads to the bender-type PEAs, a flexible mechanism housing was designed and the modal analysis was finished, avoid resonance and reduce structural vibration. Experimental results show that the resolution of the developed motor is 2 nm or less under the laser interference with an adoption rate of 10 MHz and a resolution of 0.1 nm, while the maximum stroke is over 19 mm at the constant speed of 2.3 mm s(-1), and the maximum output force is 41.6 N.
Study of MEMS microactuators

谌贵辉,张万里,彭斌,蒋洪川

DOI: https://doi.org/10.3969/j.issn.1671-4776.2004.09.005

2004-01-01

Abstract:Important significance of the technology of microelectronics mechanical systems(MEMS)is existed in the future development. The characteristic of MEMS micro actuators and all kinds of activate patterns are introduced. Taking micro pump for example,perform patterns and principle of microactuators are compared in delails.
A Single-Clamp Inchworm Actuator with Two Piezoelectric Stacks

Lu Liu,Zheyang Ji,Yue Zhang,Huan Chen,Weimin Lou,Ming Kong

DOI: https://doi.org/10.3390/mi15060718

IF: 3.4

2024-05-31

Micromachines

Abstract:Inchworm piezoelectric actuators have attracted much attention in the field of precision positioning due to the advantages of a large stroke, high output force, and high resolution. However, traditional inchworm piezoelectric actuators use two sets of clamps and a set of drive structures to achieve stepping motion, which generally requires at least three piezoelectric stacks, resulting in a complex structure and the control system. Several methodologies have been advanced to minimize the utilization of piezoelectric stacks. However, there still exists the issue of excessive volume. Therefore, an inchworm piezoelectric actuator with a single-clamp and single drive structure is proposed in the study, which provides a compact size and smaller volume. The clamping mechanism comprises two sets of clamping feet with opposite displacement, which alternate contact with the guide frame and adjustable plate to ensure that the clamping mechanism always has frictional force and accomplishes the stepping motion. The testing of the actuator's step distance, output force, and other parameters was conducted utilizing a displacement sensor. Experimental results indicate that the actuator achieved a maximum speed of 174.3 μm/s and an output force of 8.6 N when the frequency and voltage were 19 Hz and 150 V.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Research for A New Actuator with Variable Step and Large Displacement

Zhi-Jun Zhang,Ming-Long Xu,Bo Feng,Xi-Nong Zhang

DOI: https://doi.org/10.3233/jae-2010-1163

2010-01-01

International Journal of Applied Electromagnetics and Mechanics

Abstract:A new inchworm-type piezoelectric actuator with round trip, variable step, large displacement is presented in this paper. It has two parts: the clamping structure, the pushing structure. Experiment system with high voltage drivers and closed-loop control system is designed. Dynamic model for piezoelectric actuator is built up. This actuator can move a displacement of +/- 8 mm. Dynamic performance of the actuator is simulated by the MATLAB Simulink, and the results of simulation is in agreement with that of the experiment in 30 nanometer accuracy demanded.
Research on the Principle of Micro Actuators

CHEN Gui-hui,ZHANG Wan-li,PENG Bin,JIANG Hong-chuan

DOI: https://doi.org/10.3969/j.issn.1001-6848.2005.01.017

2004-01-01

Abstract:There are important significance of the technology of microelectro mechanical systems(MEMS) in the future development.The characteristic of MEMS micro actuators and all kinds of activate pattern are introduced in this paper.Take micro motor for example,execution mechanism and principle of micro actuators are compared in detail.
Design and Research of the Point-Contact Optothermal Microactuator

王旭龙琦,刘超,张冬仙

DOI: https://doi.org/10.3969/j.issn.1005-5630.2008.04.011

2008-01-01

Abstract:As the applications of micro electro-mechanical systems(MEMS) become wider in various fields,sorts of microactuators have chances to develop uninterruptedly.The principle of micro optothermal expansion and optothermal microactuator are introduced.We designed and fabricated a basic point-contact optothermal microactuator,and further developed an optimized one.Experiments were carried out to prove the feasibility of optothermal micro-actuation.The characteristic elegances of the optimized point-contact optothermal microactuator were further demonstrated through experiments.
Design and modeling of a new inchworm linear motor

Qi Wang,Bintang Yang,Lantao Liu,Guang Meng

DOI: https://doi.org/10.4028/www.scientific.net/AMR.562-564.603

2012-01-01

Advanced Materials Research

Abstract:This paper presents a research work for the design and modeling of a new inchworm linear motor. The three actuators of the motor are based on electromagnetic and permanent magnetic combined drive. The actuator may generate large output force, large displacement and quick response. A permanent magnet cam is designed to realize the continuous and smooth movement for the actuator. The motion equation of the cam mechanism is established and analyzed by SIMULINK from which the optimal contour of the cam may be confirmed. Then the general dynamic model of the linear motor is established with a 4DOF lumped parameter system. © (2012) Trans Tech Publications, Switzerland.
A 2-Dof Piezoelectric Inchworm Actuator for Precise Positioning

Shunming Hua,Guosong Liu,Yinghou Lou,Zhiqiang Li,Yuming Meng

DOI: https://doi.org/10.1155/2014/581342

IF: 2.1

2014-01-01

Advances in Mechanical Engineering

Abstract:A new rotary-linear inchworm actuator is proposed, where a solid mover can be driven along a vertical axis. The most significant feature of the 2D actuator is that all its flexible hinges for clamping and driving are integrated into a monolithic stator complex. The operational principles of its linear and rotary motion are analyzed. Prototype actuator is manufactured and some main performances are tested. Experimental results about rotary motion are as follows. Angle resolution is 0.3 mu rad, maximum rotational speed is 0.01 rad/s, dynamic torque is 0.38 Nm, and stroke is arbitrary. And those of linear motion are as follows: displacement resolution is 0.019 mu m; maximum velocity and dynamic force are 482 mu m/s and 4 Kgf separately. This proves that the 2D actuator can meet the needs of precise positioning with high force or torque.
Design of a Novel Piezoelectric Inchworm Actuator

Zhaocheng Zhang,Hong Hu

2008-01-01

Abstract:This paper presents a novel proof-of-concept design of an inchworm-type piezoelectric actuator. The proposed design uses two parallel linear guiding rods with ball bearings as a guide different from the previous configurations which adopt a guide channel or a moving shaft. Finite element analysis has been used to achieve the optimal design parameters with the frame stiffness, the dynamic performance and the fatigue strength of the frame material considered simultaneously. A prototype was constructed and partially tested and further tests are underway to quantify the performance of the actuator.
Piezoelectric Inchworm Rotary Actuator with High Driving Torque and Self-Locking Ability

Siyang Song,Shubao Shao,Minglong Xu,Yan Shao,Zheng Tian,Bo Feng

DOI: https://doi.org/10.1016/j.sna.2018.08.048

2018-01-01

Abstract:One major obstacle to the development of a piezoelectrically-driven actuator with a large motion range is the requirement to provide a high load capacity and a reliable self-locking capability simultaneously for most applications. In this work, a piezo-driven rotary actuator with a simple and compact structure is designed based on the inchworm principle to realize long-range rotary motion. High driving torque with a self-locking capability at rest is achieved by integral design of the overall structure, in which the distributions and stiffness values of the flexure hinges are carefully designed. A prototype was fabricated and the working performance of the device was tested. The test results demonstrate that the driving torque of the prototype is more than 245 Nmm, with self-locking torque of more than 882 Nmm. In addition, the maximum rotary speed is 26.74 mrad/s at a driving frequency of 180 Hz, and a minimum step rotary angle of 4.79 mu rad is obtained at a step driving voltage of 10V. (C) 2018 Elsevier B.V. All rights reserved.
A Novel Inertial Micro-Actuator and Its Application in Positioning Mechanism

LIU Chao,ZHANG Hai-jun,ZHANG Dong-xian

DOI: https://doi.org/10.3969/j.issn.1005-5630.2005.06.007

2005-01-01

Abstract:A new inertial micro-actuator based on piezo element directly driven by electronic circuits is developed.This article introduces the principle and setup of the actuator in detail.Some experiments are carried out to measure the micro displacement and dynamic property of the actuator.The experiments show that the actuator is capable of generating a smooth movement under the voltages of 20V~350V and 20Hz~125Hz.The average step ranges from 60nm~1502nm,and the maximum speed reaches to 120μm/s with infinite moving range.The application of the micro-actuator in scanning tunneling microscope for tip approaching is also discussed.
Heavy Load and Nano-Metric Positioning Magnetostrictive Inchworm Linear Motor

B. T. Yang,W. B. Xu,G. Meng,Z. Q. Feng,D. H. Yang,Y. M. Lu

2010-01-01

Abstract:A new inchworm linear motor that may be used to replace the conventional leading-screw system in high precision applications for a long stroke with heavy load and nano-metric positioning has been proposed. The research, in the last stage, focuses on using a proposed novel clamping technology to achieve the clamping actuator that makes inchworm motor realize moving against the giant magnetostrictive blocked-force and no-power latching behavior. The clamping actuator is tested by experiments and it can generate clamping force attaining to around 1050 N, and in theory up to 2300 N. In the current stage, the motor is designed, fabricated, and tested initially. It comprises of one driving and two clamping actuators, one rigid frame and a pair of guide rails. In current test, the prototype can successfully perform stable traveling behavior. The movement can be controlled to vary with either the frequency or the magnitude of the exciting currents. The loading capacity and the positioning resolution of the prototype have been initially tested by experiments.
Linear Inchworm Mechanism Based on Giant Magnetostrictive and Piezoelectric Materials

LI Cuihong,YE Zishen,MENG Yonggang,TIAN Yu,WEN Shizhu

DOI: https://doi.org/10.3321/j.issn:1000-0054.2005.08.013

2005-01-01

Abstract:A linear inchworm mechanism was developed with a magnetostrictive actuator and two piezoelectric translators fixed in a specially designed flexible frame to provide both long travel range and high positioning precision. The mechanism movement is controlled by a closed-loop feed back algorithm using a high precision length gauge as the transducer. Test results indicate that the mechanism reliably moves forward and backward with a positioning accuracy of up to 15 nm.

Research Progress of Inchworm Actuator with MEMS Teeth

Research Progress of Inchworm Actuator with Clutch Clamping Mechanism

Experimental Research on Output Performances of Giant Magnetostrictive Actuator

Research Advances of Improving Thrust Power of Inchworm-Type Piezoelectric Linear Actuators

Development and Application of Inchworm-Type Piezoelectric Linear Actuator

Development and Experiment Evaluation of a Compact Inchworm Piezoelectric Actuator Using Three-Jaw Type Clamping Mechanism

A piezoelectric inchworm actuator of linear type using symmetrical lever amplification

A Compact Inchworm Piezoelectric Actuator with High Speed: Design, Modeling, and Experimental Evaluation

Design and experimental evaluation of an inchworm motor driven by bender-type piezoelectric actuators

Study of MEMS microactuators

A Single-Clamp Inchworm Actuator with Two Piezoelectric Stacks

Research for A New Actuator with Variable Step and Large Displacement

Research on the Principle of Micro Actuators

Design and Research of the Point-Contact Optothermal Microactuator

Design and modeling of a new inchworm linear motor

A 2-Dof Piezoelectric Inchworm Actuator for Precise Positioning

Design of a Novel Piezoelectric Inchworm Actuator

Piezoelectric Inchworm Rotary Actuator with High Driving Torque and Self-Locking Ability

A Novel Inertial Micro-Actuator and Its Application in Positioning Mechanism

Heavy Load and Nano-Metric Positioning Magnetostrictive Inchworm Linear Motor

Linear Inchworm Mechanism Based on Giant Magnetostrictive and Piezoelectric Materials