Comparison and Analysis of Different Methods in Calibration of the Spring Constant of AFM Cantilever Probes

Yunpeng SONG,Sen WU,Xing FU,Linyan XU

DOI: https://doi.org/10.3969/j.issn.1004-1699.2015.08.011

2015-01-01

Abstract:Micro-cantilever probe is an important force sensor in atomic force microscope (AFM) based micro-or nano-Newton force measurement. The accuracy of the spring constant is of great significance to the reliability of the force measurement result. At present,many calibration methods have been proposed,but every method has its’limitations, and the accuracy of each method is different. So,the comparison of different method is needed to make a choice of which method is the best one. The normal spring constant of three kinds of commercial cantilevers are calibrated with the traceable spring constant calibration system built in our laboratory. The calibration principle is based on balance method. Then three other calibration methods (the dimensional method,the Sader method,and the thermal noise method) are used to calibrate the test cantilevers again. We compared the calibration results of different methods and discussed the advantages and shortcomings of each method in detail. The analysis results indicate that in comparison with other methods, the balance method has wider application range,higher accuracy and traceability to SI. It can become one of the best methods in calibration of the spring constant of various cantilevers accurately.