Abstract:The atomic force microscope (AFM) is widely used in a wide range of applications due to its high scanning resolution and diverse scanning modes. In many applications, there is a need for accurate and precise measurement of the vibrational resonance frequency of a cantilever. These frequency shifts can be related to changes in mass of the cantilever arising from, e.g., loss of fluid due to a nanolithography operation. A common method of measuring resonance frequency examines the power spectral density of the free random motion of the cantilever, commonly known as a thermal. While the thermal is capable of reasonable measurement resolution and speed, some applications are sensitive to changes in the resonance frequency of the cantilever, which are small, rapid, or both, and the performance of the thermal does not offer sufficient resolution in frequency or in time. In this work, we describe a method based on a narrow-range frequency sweep to measure the resonance frequency of a vibrational mode of an AFM cantilever and demonstrate it by monitoring the evaporation of glycerol from a cantilever. It can be seamlessly integrated into many commercial AFMs without additional hardware modifications and adapts to cantilevers with a wide range of resonance frequencies. Furthermore, this method can rapidly detect small changes in resonance frequency (with our experiments showing a resolution of ∼0.1 Hz for cantilever resonances ranging from 70 kHz to 300 kHz) at a rate far faster than with a thermal. These attributes are particularly beneficial for techniques such as dip-pen nanolithography.

Calibration of the Spring Constant of AFM Cantilever

Calibration of the Effective Spring Constant of Ultra-Short Cantilevers for A High-Speed Atomic Force Microscope

Improved Calibration System of Micro-Cantilever Spring Constant

Calibration of the spring constant of AFM micro-cantilever based on bending method

Comparison and Analysis of Different Methods in Calibration of the Spring Constant of AFM Cantilever Probes

Accurate flexural spring constant calibration of colloid probe cantilevers using scanning laser Doppler vibrometry

Research Progress on the Calibration Methods for Elastic Constant of Atomic Force Microscopy Cantilevers

Calibrate the Non-Orthogonal Error of AFM with Two-Dimensional Self-Traceable Grating.

Dimensions and spring constants of rectangular AFM cantilevers determined from resonance measurements

Lateral force calibration for atomic force microscope cantilevers using a suspended nanowire

Eliminating the effect of acoustic noise on cantilever spring constant calibration

A virtual instrument to standardise the calibration of atomic force microscope cantilevers

Improved Wedge Method of the AFM Friction Force Calibration

A new method to calibrate an atomic force microscope with the self-traceable chromium grating fabricated by atomic lithography

Hydrodynamic function and spring constant calibration of FluidFM micropipette cantilevers

Spring constant of an AFM cantilever with a thin-film plasmonic waveguide formed at its end

Large colloidal probes for atomic force microscopy: Fabrication and calibration issues

Measuring stiffness and residual stress of thin films by contact resonance atomic force microscopy

High-resolution measurement of atomic force microscope cantilever resonance frequency

Measurement of microscope calibration standards in nanometrology using a metrological atomic force microscope

Experiments on the Deformation of MEMS Mciro-Cantilever Using AFM