Improved Wedge Method of the AFM Friction Force Calibration

CHEN Tian-xing,ZHANG Xiang-jun,MENG Yong-gang
DOI: https://doi.org/10.3969/j.issn.1007-9289.2011.04.015
2011-01-01
China surface engineering
Abstract:The friction force calibration of the atomic force microscopy(AFM) is a major problem for the friction force measurement between surfaces under micro load with AFM.The traditional Ogletree wedge method ignores the influence of the surface adhesion force on the friction which will result in a smaller fiction coefficient when the applied load is relatively smaller.An improved wedge method of the AFM friction force calibration is derived in this paper.With the improved wedge method,the friction force calibration is conducted on a standard grating and the slop fabricated by focused ion beam(FIB) method respectively.Comparing with the commonly used standard grating,the slop made by FIB can afford more effective data.So the calibration result is more accurate.The calibration result obtained with the improved wedge method and that with the Ogletree method are compared.The result shows that under a relatively smaller load(6 μN),the improved wedge method is more accurate;under a higher load(6 μN),the results obtained by the two methods are closed to each other.The improved wedge method is a more accurate AFM friction force calibration method.
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