Abstract:Nanoscale measurement is an essential task of nanomanufacturing, and measurement traceability is a fundamental aspect of nanoscale measurement. High-precision nanoscale measurement instruments (e.g. Atomic Force Microscopes (AFM) and Scanning Electron Microscopes (SEM)) need to be calibrated by traceable standards to ensure their accuracy and reliability. However, due to the suboptimal accuracy, uniformity, and consistency of existing standards, they need to be calibrated by metrological instruments traceable to primary length standards (e.g. physical wavelength standards) before use. This results in a long traceability chain that leads to error accumulation and significantly reduces calibration efficiency. This paper proposes a novel shortened and simplified traceability chain, where the physical wavelength standard corresponding to the 7 S 3 → 7 P 4 0 transition frequency of chromium atoms is materialized into self-traceable gratings using the atom lithography technology. The self-traceable gratings can then be directly applied for calibrating measurement instruments. To verify this approach, the self-traceable gratings are calibrated using a metrological AFM of the Physikalisch-Technische Bundesanstalt. Measurement results confirmed the feasibility of the approach. Particularly, our results show that the self-traceable gratings have excellent uniformity over different measurement areas and consistency over different samples, both at 0.001 nm level. Finally, the application of the self-traceable gratings for the calibrations of a commercial AFM and SEM is demonstrated. The new traceability chain significantly simplifies the calibration process, providing a more reliable and higher efficient calibration approach for advanced nanomanufacturing than that of the state-of-the-art.

Measurement of microscope calibration standards in nanometrology using a metrological atomic force microscope

Calibrate the Non-Orthogonal Error of AFM with Two-Dimensional Self-Traceable Grating.

Position Measuring System in Metrological Atomic Force Microscope

Step Height Measurement by the Metrological Atomic Force Microscope

Calibration of the Effective Spring Constant of Ultra-Short Cantilevers for A High-Speed Atomic Force Microscope

Measurement of Nano-step Height Scales with a Metrological AFM Head

Surface Profile Measurement of Micro-Optics by Using a Long Stroke Atomic Force Microscope

Segmental Calibration for Commercial AFM in Vertical Direction

Towards High Accuracy Surface Profile Characterization in Atomic Force Microscopy

Study of the AFM head in a Large-scale nanostructure measure system

A new method to calibrate an atomic force microscope with the self-traceable chromium grating fabricated by atomic lithography

A virtual instrument to standardise the calibration of atomic force microscope cantilevers

A wide-range metrology AFM and its applications

Design of a large measurement-volume metrological atomic force microscope (AFM)

Two-dimensional Nanometer Scale Gratings Measurement by Metrological Atomic Force Microscope

Research of the Atomic Force Microscopy Profilometer System

Dual imaging-unit atomic force microscope for nanometer order length metrology based on reference scales

Quantitative Measurements of Electromechanical Response with a Metrological Atomic Force Microscope

Shortened and simplified traceability chain for dimensional metrology based on self-traceable standards

Lateral force calibration for atomic force microscope cantilevers using a suspended nanowire

A Novel Atomic Force Microscope with High Stability and Scan Speed