Abstract:Nanoscale measurement is an essential task of nanomanufacturing, and measurement traceability is a fundamental aspect of nanoscale measurement. High-precision nanoscale measurement instruments (e.g. Atomic Force Microscopes (AFM) and Scanning Electron Microscopes (SEM)) need to be calibrated by traceable standards to ensure their accuracy and reliability. However, due to the suboptimal accuracy, uniformity, and consistency of existing standards, they need to be calibrated by metrological instruments traceable to primary length standards (e.g. physical wavelength standards) before use. This results in a long traceability chain that leads to error accumulation and significantly reduces calibration efficiency. This paper proposes a novel shortened and simplified traceability chain, where the physical wavelength standard corresponding to the 7 S 3 → 7 P 4 0 transition frequency of chromium atoms is materialized into self-traceable gratings using the atom lithography technology. The self-traceable gratings can then be directly applied for calibrating measurement instruments. To verify this approach, the self-traceable gratings are calibrated using a metrological AFM of the Physikalisch-Technische Bundesanstalt. Measurement results confirmed the feasibility of the approach. Particularly, our results show that the self-traceable gratings have excellent uniformity over different measurement areas and consistency over different samples, both at 0.001 nm level. Finally, the application of the self-traceable gratings for the calibrations of a commercial AFM and SEM is demonstrated. The new traceability chain significantly simplifies the calibration process, providing a more reliable and higher efficient calibration approach for advanced nanomanufacturing than that of the state-of-the-art.

Shortened and simplified traceability chain for dimensional metrology based on self-traceable standards

Optimization and Fabrication of Chromium Grating in Self-Traceable Interferometer

Grating Pitch Comparator Traceable to the Cr Atom Transition Frequency

Calibrate the Non-Orthogonal Error of AFM with Two-Dimensional Self-Traceable Grating.

Self-traceable angle standards with simplified traceability chain for dimensional metrology

Chromium Self-Traceable Length Standard: Investigating Geometry and Diffraction for Length Traceability Chain

Nanometer displacement measurement based on metrological self-mixing grating interferometer traceable to the pitch standard of one-dimension chromium self-traceable grating

Length traceability chain based on chromium atom transition frequency

A new method to calibrate an atomic force microscope with the self-traceable chromium grating fabricated by atomic lithography

High Accuracy Calibration Method for Multi-Line Structured Light Three-Dimensional Scanning Measurement System Based on Grating Diffraction.

Near Common-Path Optical Fiber Interferometer for Potentially Fast On-Line Microscale-Nanoscale Surface Measurement

Traceable atomic force microscope based on monochromatic light interference

A wide-range metrology AFM and its applications

Segmental Calibration for Commercial AFM in Vertical Direction

Measurement of microscope calibration standards in nanometrology using a metrological atomic force microscope

Step Height Measurement by the Metrological Atomic Force Microscope

Dual imaging-unit atomic force microscope for nanometer order length metrology based on reference scales

Measurement of Sub-Surface Microstructures Based on a Developed Ultrasonic Atomic Force Microscopy

Position Measuring System in Metrological Atomic Force Microscope

A Study on Length Traceability and Diffraction Efficiency of Chromium Gratings

Comparison of line width calibration using critical dimension atomic force microscopes between PTB and NIST