Fabrication and evaluation of single-crystal silicon cantilevers with ultra-low spring constants
Dong-Weon Lee,Jung-Ho Kang,Urs Gysin,Simon Rast,Ernst Meyer,Michel Despont,Christoph Gerber
DOI: https://doi.org/10.1088/0960-1317/15/11/026
2005-10-17
Journal of Micromechanics and Microengineering
Abstract:We successfully fabricated single-crystal silicon cantilevers with spring constants as low as 10−5 N m−1 for use in magnetic resonance force microscopy applications. The fabricated ultra-thin silicon cantilevers had thicknesses ranging from 200 to 400 nm, lengths ranging from 340 to 450 µm and a width of 5 µm. We characterized their force sensitivity in the vacuum range from ambient pressure to 10−3 Pa and the temperature range from 15 to 300 K. A minimum value is observed for the internal friction, Q−1, at 160 K, which corresponds to an activation peak due to phonon scattering by atomic-scale defects. The best force sensitivity was achieved at 20 K, where it was increased by a factor of 10 as compared to that observed at room temperature.
engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied