Method for measuring micro-cantilever force constant

Lianmao Peng,Xianlong Wei,Qing Chen
2010-01-01
Abstract:The invention provides a method for accurate measurement of the micro-force and the force constant of a micro-cantilever; the invention belongs to the field of nanometer measurement. The method is asfollows that the two ends of a nanometer material are fixed on two pivots and an axial micro-pulling force T is applied on the nanometer material; an electrode is arranged on the middle part of the side of the nanometer and an alternate voltage is applied on the electrode to motivate the nanometer material to generate resonance, therefore, the natural frequency f of the nanometer material is acquired; according to the material characteristics and the geometry characteristics of the nanometer material as well as the boundary condition of the nanometer material, the relation between the naturalfrequency and the axial pulling force of the nanometer material, namely the f-t curves of the nanometer material, can be work out by a vibration equation; according to the measured natural frequency f, the size of the micro-pulling force T can be acquired. The method can be adopted further to measure the micro-deflective force of the micro-cantilever when in deflection and then the force constantof the micro-cantilever can be measured by combining with measurement of deflective displacement. The invention can be used for developing the instrument which is applied in accurate measurement of micro-force in pico-Newton scale or even in sub-pico-Newton scale.
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