Measuring the Mechanical Properties of Micro-Cantilever Sensors

ZHANG Tian-lin,GUO Zhe-ying,ZHANG Qing-chuan,ZHANG Tai-hua,HE Shi-ping
DOI: https://doi.org/10.3969/j.issn.0253-2778.2006.05.021
2006-01-01
Journal of University of Science and Technology of China
Abstract:The elastic modulus of infrared detective micro-cantilever sensors was measured by three different methods—one static and two dynamic measurements.The modulus of the sensor was measured directly by nano-indenter in the static measurement.In the dynamic measurement,the nature frequency of the sensor was measured firstly by optical filtering in the plane of wave spectrum and Doppler scanning vibrometer.In combination with the numerical simulation method,the equivalent elastic modulus of the sensor was calculated.More precise value was obtained in comparison with the other measurement methods tested,thus providing reliable data for the optimal design and evaluation of micro-cantilever sensors.
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