Development of a Microcantilever Temperature Sensor Based on Optical Readout

WU Lin,WU Ding-qiang,Zhang Qing-chuan

2012-01-01

Abstract:In order to realize rapid,precise and high-resolution measurement of ambient temperature,a microcantilever temperature sensor was self-designed and manufactured based on optical readout.The bending deformation of microcantilever caused by internal thermal stress variation along with temperature due to the thermal expansion coefficient of two materials-gold and silicon nitride.Then,temperature can be accurately measured by calibrating the cantilever deflection based on optical lever method.In experiment,a commercially available triangular microcantilever was tested(Its parameters: length 200μm,width 40μm,0.6μm thickness of SiNx,and 0.06μm thickness of Au).Experimental results show that the sensor presents good measurement repeatability;its temperature resolution reaches 20mK,when 25mm length of optical arm was set.For a particular microcantilever size,the temperature resolution can be as high as 0.01mK by optimizing bi-material thickness ratio,which can be used for precise temperature measurement.