Abstract:We review recent advances in experimental methods for high spatial-resolution and high time-resolution thermometry, and the application of these and related methods for measurements of thermal transport in low-dimensional structures. Scanning thermal microscopy (SThM) achieves lateral resolutions of 50 nm and a measurement bandwidth of 100 kHz; SThM has been used to characterize differences in energy dissipation in single-wall and multi-wall carbon nanotubes. Picosecond thermoreflectance enables ultrahigh time-resolution in thermal diffusion experiments and characterization of heat flow across interfaces between materials; the thermal conductance G of interfaces between dissimilar materials spans a relatively small range, 20 <G <200 MW m(-2) K-1 near room temperature. Scanning thermoreflectance microscopy provides nanosecond time resolution and submicron lateral resolution needed for studies of heat transfer in microelectronic, opto-electronic and micromechanical systems. A fully-micromachined solid immersion lens has been demonstrated and achieves thermal-radiation imaging with lateral resolution at far below the diffraction limit, <2 mum. Microfabricated metal bridges using electrical resistance thermometry and joule heating give precise data for thermal conductivity of single crystal films, multilayer thin films, epitaxial superlattices, polycrystalline films, and interlayer dielectrics. The room temperature thermal conductivity of single crystal films of Si is strongly reduced for layer thickness below 100 nm. The through-thickness thermal conductivity of Si-Ge and GaAs-AlAs superlattices has recently been shown to be smaller than the conductivity of the corresponding alloy. The 3omega method has been recently extended to measurements of anisotropic conduction in polyimide and superlattices. Data for carbon nanotubes measured using micromachined and suspended heaters and thermometers indicate a conductivity near room temperature greater than diamond.

A microcantilever heater-thermometer with a thermal isolation layer for making thermal nanotopography measurements

Thermometry and Thermal Transport in Micro/Nanoscale Solid-State Devices and Structures

A Silicon Nanowire Heater and Thermometer

Thermoelectric voltage at a nanometer-scale heated tip point contact

Nanomechanical thermometry for probing sub-nW thermal transport

Development of a Microcantilever Temperature Sensor Based on Optical Readout

Quantitative Thermal Imaging of Single-Walled Carbon Nanotube Devices by Scanning Joule Expansion Microscopy.

Photonic thermometer by silicon nitride microring resonator with milli-kelvin self-heating effect

Dynamic Thermomechanical Response of Bimaterial Microcantilevers to Periodic Heating by Infrared Radiation

Microheater Chips with Carbon Nanotube Resistors

Single Silicon Nanowires As Inherent Heaters and Thermometers for Thermal Conductivity Measurements

Thermal Visualization of Buried Interfaces Enabled by Ratio Signal and Steady-State Heating of Time-Domain Thermoreflectance

Experimental setup for thermal measurements at the nanoscale using a SThM probe with niobium nitride thermometer

Micro-thermocouple on nano-membrane: thermometer for nanoscale measurements

Precise nanoscale temperature mapping in operational microelectronic devices by use of a phase change material

Experimental set-up for thermal measurements at the nanoscale using an SThM probe with niobium nitride thermometer

TEM-compatible microdevice for the complete thermoelectric characterization of epitaxially integrated Si-based nanowires

Rapid thermal lysis of cells using silicon-diamond microcantilever heaters

Bimaterial micro-cantilever uncooled infrared imaging system-design and fabrication of micro-cantilever array

Fabrication Of Wafer-Level Micro Silicon Heaters For Chip Scale Atomic Magnetometers

Al doped poly-Si micro-heater for thermomechanical fabrication of micro/nano structure