TEM-compatible microdevice for the complete thermoelectric characterization of epitaxially integrated Si-based nanowires

Jose Manuel Sojo Gordillo,Yashpreet Kaur,Saeko Tachikawa,Nerea Alayo,Marc Salleras,Nicolas Forrer,Luis Fonseca,Alex Morata,Albert Tarancon,Ilaria Zardo
DOI: https://doi.org/10.1039/d4nh00114a
2024-05-10
Nanoscale Horizons
Abstract:Nanostructured materials present improved thermoelectric properties due to non-trivial effects at the nanoscale. However, the characterization of individual nanostructures, especially from the thermal point of view, is still an unsolved topic. This work presents the complete structural, morphological, and thermoelectrical evaluation of the selfsame individual bottom-up integrated nanowire employing an innovative micro-machined device compatible with Transmission Electron Microscopy whose fabrication is also discussed. Thanks to a design that arranges the nanostructured samples completely suspended, detailed structural analysis using Transmission Electron Microscopy is enabled. In the same device architecture, electrical collectors and isolated heaters are available at both ends of the trenches for thermoelectrical measurements of the nanowire i.e. thermal and electrical properties simultaneously. This allows the direct measurement of the nanowire power factor. Furthermore, micro-Raman thermometry measurements were performed to evaluate the thermal conductivity of the same suspended silicon nanowire. A thermal profile of the self-heating nanowire could be spatially resolved and used to compute the thermal conductivity. In this work, heavily-doped silicon nanowires were grown on this microdevices yielding a thermal conductivity of 30.8 ±1.7 W K -1 m -1 and a power factor of 2.8 mW m -1 K -2 at an average nanowire temperature of 400 K. Notably, no thermal contact resistance was observed between the nanowire and the bulk, confirming the epitaxial attachment. The device presented here shows remarkable utility in the challenging thermoelectrical characterization of integrated nanostructures and in the development of multiple devices such as thermoelectric generators.
materials science, multidisciplinary,nanoscience & nanotechnology,chemistry, physical
What problem does this paper attempt to address?
The problem that this paper attempts to solve is the challenge of comprehensively characterizing the thermoelectric properties of a single nanowire structure at the nanoscale. Specifically, the authors propose a new multi - purpose test device (MPTD), which is capable of performing a complete morphological, structural, and thermoelectric property evaluation of a single bottom - up integrated nanowire. Existing methods usually require extracting the structure, morphology, and thermoelectric properties separately on different samples, which makes it difficult to achieve a direct correlation between different properties due to the inherent variability of the samples. In contrast, the micro - fabricated device introduced in this paper has a unique design and can measure all these properties on the same nanowire, thus avoiding the problems caused by sample transfer, and through complete epitaxial integration, the contact resistance can be made almost negligible, greatly simplifying the measurement process. The main innovative points of this device are: 1. **Comprehensive property measurement**: It is able to conduct transmission electron microscopy (TEM) experiments, electrical measurements, and thermal conductivity measurements simultaneously on the same nanowire. 2. **High - precision thermoelectric measurement**: Through micro - Raman thermal measurement technology, the thermal conductivity of the nanowire can be directly measured, and at the same time, it can also provide the first direct evidence of no thermal contact resistance in double - sided epitaxial integrated nanowires. 3. **Compatibility with multiple techniques**: The device design allows the use of standard TEM sample holders and is applicable to multiple analysis techniques, such as TEM, nano - X - ray, electron diffraction, etc., as well as optical and thermal analysis. In summary, this work not only provides a brand - new method for evaluating the heat absorption coefficient of nanowires but also provides a new tool for the comprehensive thermoelectric property characterization of nanostructures and is expected to play an important role in the research and development of silicon - based micro - thermoelectric devices.