Litao3 Films with C-Axis Preferred Orientation Prepared on Si(111) Substrate by Sol-Gel Method

Sd Cheng,Y Zhou,Ch Kam,Xq Han,Wx Que,Yl Lam,Yc Chan,Jt Oh,Ws Gan
DOI: https://doi.org/10.1016/s0167-577x(00)00014-8
IF: 3
2000-01-01
Materials Letters
Abstract:LiTaO3 films with c-axis preferred orientation have been prepared on Si(lll) substrates using sol-gel spin-coating and rapid thermal annealing. Hydrogen-terminated silicon surface, preheating temperature, and unidirectional heat flow during the heat treatment are essential factors for the c-axis texture. The texture is useful in pyroelectric, metal-ferroelectric-semiconductor (MFS) nonvolatile memory, and integrated optics applications. (C) 2000 Elsevier Science B.V. All rights reserved.
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