Abstract:Lithium niobate ( LiNbO 3) thin film is an important material for optical waveguide. Recently, particular attention has been paid to the application of LiNbO 3 (LN) thin films. To develop and fabricate integrated optical devices, the growth of thin LN epitaxial films onto silicon substrate is of great importance and particularly attractive. In this paper, LN thin film was grown by pulsed laser deposition (PLD). Stoichiometric LN ceramic is used as a target. Amorphous SiO 2 buffer layer was coated on Si (100) wafer by in-situ themal oxidation before the deposition. The optimized condition of growing LN film on Si (100) by PLD is found: O 2 pressure 30 Pa, substrate temperature 600°C. Only (006) reflection of LN was observed besides the (002) reflection of silicon substrate from XRD pattern. The FWHM (~0.21°) of (006) reflection peak is much narrower than the value reported by Lee [1]. The results of XRD measurement indicate that the LN film was epitaxially grown along the c-axis. Transmission electron microcopy (TEM) patterns confirm that the film has superior crystalline quality. The optical waveguiding properties of the films were demonstrated by a prism coupler method. Fully c-oriented thin film could be grown on silicon substrate by PLD without the buffer layer and the induced electric field.

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Magnetotransport properties of c -axis oriented La 1− x Sr x MnO 3+δ thin films fabricated by sol-gel spin-coating method

Crystallographic Orientation Dependence of Dielectric Response in Lead Strontium Titanate Thin Films

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Preparation of LiNbO3 Films on Si( 111 ) Substrates by a Modified Sol-Gel Process

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Growth of ferroelectric lithium niobate-tantalate LiNb(1-x)TaxO3 crystals

Phase Composition and Electrical Properties of K0.4Na0.6Nb1-xTaxO3 Lead-Free Thin Films

Deposition of stress free c-axis oriented LiNbO3 thin film grown on (002) ZnO coated Si substrate

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Low-temperature Crystallization and Orientation Evolution of Nb-doped Pb(Zr,Ti)O3 Thin Films Using a Pb0.8Ca0.1La0.1Ti0.975O3 Seed Layer

Preparation of LiTaO3 nano-crystalline films by sol-gel process

Effects of Lanthanum Doping on the Preferred Orientation, Phase Structure and Electrical Properties of Sol–gel Derived Pb1–3x/2Lax (zr0.6ti0.4)o3 Thin Films

The oriented growth of PbTiO3 thin films deposited by a sol-gel process on substrates without lattice match

Highly C-Axis Oriented LiNbO3 Thin Film Grown on SiO2/Si Substrates by Pulsed Laser Deposition

ChemInform Abstract: Preparation of Crystalline LiNbxTa1‐xO3 (0 ≤ X ≤ 1) Films from Metal Alkoxide Solutions.

GROWTH AND CHARACTERIZATION OF C-ORIENTED <font>LiNbO</font><sub>3</sub> THIN FILMS ON Si (100) BY PLD