Abstract:Lithium tantalate (LiTaO3) thin films were deposited by high power (250W) RF magnetron sputtering on Pt/Ti/SiO2/Si(100) substrates and were annealed from 600 degrees C-700 degrees C in an O-2 or N-2 environment. The crystallinity of those films were examined by x-ray diffraction and Raman spectra to study the effects of annealing temperature and annealing gas on the crystal properties of LiTaO3 thin films. LiTaO3 thin films annealing at 650 degrees C in O-2 have a better crystalline quality in a (012) preferential orientation. However, LiTaO3 thin films annealed at 700 degrees C in O-2 contain impurities with titanium oxide (Ta2O5). This is attributable to the fact that the crystal structure is unstable above the Curie temperature and the tantalum reacts with oxygen in the annealing process. At the same time, the result of the Raman spectra suggests that LiTaO3 thin films annealed at 600 degrees Cand 650 degrees C are closer to near-stoichiometric LiTaO3 and have less Li diffusivity and Li-deficient phases. Finally, optical constants of LiTaO3 films are also primarily probed by spectroscopic ellipsometry. For LiTaO3 thin films annealed at 650 degrees C in O-2, the refractive index is 2.33, the extinction coefficient is 0.002 34 and the direct optical band gap energy is estimated to be minimal at 3.66 eV.

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Preparation of LiTaO3 nano-crystalline films by sol-gel process

Preparation and Characterization of LiTaO 3 Films Derived by an Improved Sol-Gel Process

Crystallization Behavior and Hydrophilic Performances of V2O5–TiO2 Films Prepared by Sol–gel Dip-Coating

Tuning of Electrical and Optical Properties of Tantalum Doped TiO2 Flims Prepared by Sol-gel Method

Preparation and characterization of lithium tantalate thin films using a high-concentration precursor solution

Nanocrystalline Titania Made From Interactions Of Ti With Hydrogen Peroxide Solutions Containing Tantalum Chloride

Synthesis and Characterization of Lithium Tantalate Thin Films Fabricated by Sol-Gel Method

Sol-gel derived LiTaO 3

Sol-Gel Derived Thin Films of LiTaO3 on SiO2/Si Substrates for Optical Waveguide Applications

Study of the crystalline and optical properties of lithium tantalate thin films deposited by high power RF magnetron sputtering

Preparation of C-Axis Oriented Linb1-Xtaxo3 Films on Si(111) Substrates by A Modified Sol-Gel Process

Preparation of LiTaO<sub>3</sub> nanoparticles by a sol–gel route

Processing of Crystalline Li(Nb, Ta)O3 Films with Preferred Orientation Through Metal Alkoxides

Preparation of Nano-TiO<sub>2</sub> Particulate Film from Crystalline Sol

Preparation of Nano-Structured BaTiO3 Thin Film by Electrophoretic Deposition and Its Characterization

Preparation of LiTaO 3 nanoparticles by a sol–gel route

Preparation and Study of Oriented TiO2 Thin Film

Crystallization behavior of LiNO3-doped SiO2-TiO2 films prepared through sol-gel method

Preparation of TiOx-C Nano-Composite Films as Solar Selective Absorbers by Sol-Gel Method

Low-Temperature Deposition of Bioactive Crystalline Titania Films: Effects of Tantalum