Processing of Crystalline Li(Nb, Ta)O3 Films with Preferred Orientation Through Metal Alkoxides

Hirano Shin-Ichi,Kato Kazumi

DOI: https://doi.org/10.1557/proc-155-181

1989-01-01

Abstract:LiNbO3 and LiTaO3 are very attractive and useful materials, which have been applied to piezoelectric and electro-optic devices. The authors have synthesized the stoichiometric crystalline fine powders and films of LiNbO3 at temperatures as low as 250°C by the controlled hydrolysis of double alkoxide solutions; and this method was used to prepare Li(Nb, Ta)O3 solid solution films with and without the preferred orientation. Water used during the processing played an important role in the low-temperature crystallization and the elimination of free carbon in the films. The water for the partial hydrolysis affected the properties of alkoxide solutions for dip-coating, and the morphologies of crystalline films. Water in a mixed gas flow with oxygen during calcination accelerated the crystallization of the alkoxy-derived films at low temperatures.