Double-sided Reel-to-reel Metal-Organic Chemical Vapor Deposition System of YBa2Cu3O7-δ Thin Films

Fei Zhang,Jie Xiong,Xin Liu,Ruipeng Zhao,Xiaohui Zhao,Bowan Tao,Yanrong Li

DOI: https://doi.org/10.1116/1.4884367

2014-01-01

Abstract:Two-micrometer thick YBa2Cu3O7-δ (YBCO) films have been successfully deposited on both sides of LaAlO3 single crystalline substrates by using a home-made reel-to-reel metal-organic chemical vapor deposition (MOCVD) system, which has two opposite symmetrical shower heads and a special-designed heater. This technique can simultaneously fabricate double-sided films with high deposition rate up to 500 nm/min, and lead to doubling current carrying capability of YBCO, especially for coated conductors (CCs). X-ray diffraction analysis showed that YBCO films were well crystallized and highly epitaxial with the full width at half maximum values of 0.2° ∼ 0.3° for the rocking curves of (005) YBCO and 1.0° for Φ-scans of (103) YBCO. Scanning electron microscope revealed dense, crack-free, slightly rough surface with Ba-Cu-O precipitates. The films showed critical current density (Jc, 77 K, 0 T) of about 1 MA/cm2, and overall critical current of 400 A/cm, ascribed to the double-sided structure. Our results also demonstrated that the temperature and composition in the deposition zone were uniform, which made MOCVD preparation of low cost and high performance double-sided YBCO CCs more promising for industrialization.