Abstract:Using a novel DC magnetron sputtering system, high quality YBa2Cu3O7-delta (YBCO) thin films were deposited on both sides of twelve pieces of 3-inch LaAlO3(001) single crystal substrates in one batch. This sputtering system has a rotatable disc sample holder with the LaAlO3 substrates being positioned in the middle of upper and lower YBCO targets. These two sputter guns are arranged to simultaneously deposit YBCO thin films on both sides of the substrate. The rotatable sample holder is an important approach to large scale deposition of high quality YBCO thin films. In this manner, the sputtered species can diffuse well around the substrates during one rotation cycle. Furthermore, the anode is installed in the inner of rotatable disc sample holder to avoid negative ion bombardment. Thus, a good uniformity over the whole area for all the films has been realized. The full-width at half-maximum (FWHM) values of the (005) rocking curves typically range from 0.49 degrees to 0.56 degrees. The superconducting critical temperatures fall in the range of 89-90 K and the critical current densities are between 3.75 and 4.0 MA cm(-2) at 77 K. The microwave surface resistance, R-S (77 K, 10 GHz), of the YBCO thin films range typically from 0.56 to 0.71 m Omega, which make these films suitable for microwave applications.

High quality uniform YBCO film growth by the metalorganic deposition using trifluoroacetates

Double-sided Reel-to-reel Metal-Organic Chemical Vapor Deposition System of YBa2Cu3O7-δ Thin Films

High Quality Ybco Film Growth on Srtio3-Buffered Laalo3 Substrate by Full Solution Method

YBCO Superconducting Film Coated on LaAlO 3 Substrate by TFA-MOD Process

Batch Production of Large-Area Double-Sided Yba2cu3o7-Delta Thin Films by Dc Magnetron Sputtering

Preparation of φ76.2 mm Thick YBCO Films by Low-Fluorine Sol-Gel Process

YBCO Thin Films Prepared by Fluorine-Reduced Metal–organic Deposition Using Trifluoroacetates

Preparation of Yba2cu3o7-X Superconducting Thin-Films over Large Area Substrates

Development of High Critical Current YBCO Coated Conductors by Photo-Assisted MOCVD

MOCVD Derived Double-Sided YBa2Cu3O7−δ Films on Y2O3/YSZ/CeO2 Buffered Textured Metal Substrates

In-situ Preparation of YBCO Thin Films on Single Crystal LaAlO3

High Performance GdBa2Cu3O7− Film Preparation by Non-Fluorine Chemical Solution Deposition Approach

Epitaxial growth of YBCO thin films on LaAlO3 substrate with CeO2 buffer layer

Preparation of YBa2Cu3O7−δ Films by MOD Method Using Trifluoroacetate As Precursor

In-situ Preparation of YBCO Thin Films on Single Crystal LaAlO<Subscript>3</Subscript>

Study on the growth of YBCO films deposited by rapid pyrolysis process TFA-MOD

Progress towards a low-cost commercial coated conductor

Preparation and characterization of YBCO thin films by plane target sputtering

Ethanol-based TFA–MOD Method for Preparation of YBCO Films

Epitaxial Growth of Mocvd-Derived Ybco Films by Modulation of Cu(Tmhd)(2) Concentration

Polymer Assisted Thick Single-Layer YBa 2 Cu 3 O 7-Δ Films Prepared with Modified TFA-MOD Method