Continuous Deposition of Double-sided Y2O3/YSZ/CeO2 Buffer Layers for Coated Conductors
Xia Yudong,Zhang Fei,Zhang Ning,Zhang Junfei,Chai Gang,Guo Pei,Jing Tongguo,Xiong Jie,Zhao Xiaohui,Tao Bowan,Li Yanrong
2011-01-01
Rare Metal Materials and Engineering
Abstract:In this paper, we report a continuous deposition method for double-sided CeO2/YSZ/Y2O3 buffer layers by reel-to-reel in a D.C. magnetron reactive sputtering system. X-ray diffraction exhibited all the samples were highly c-axis oriented and atomic force microscope observations revealed a smooth, dense and crack-free surface morphology. Out-of-plane, in-plane texture, and surface roughness of multi-buffer layers were improved under optimized deposition conditions. Full width at half maximum (FWHM) values of out-of-plane and in-plane were about 4 degrees and 5.5 degrees in 50 cm double-sided buffed template. YBa2Cu3O7-delta films with thickness of 1.2 mu m were deposited on both sides of the buffed tape. Both sides showed similar critical current density, J(c) (77 K, self field) as 0.8 MA/cm(2) and 0.7 MA/cm(2), respectively.