Reel-to-reel continuous simultaneous double-sided deposition of highly textured CeO<sub>2</sub> templates for YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7−δ</sub> coated conductors

J Xiong,B W Tao,W F Qin,J L Tang,X Han,Y R Li
DOI: https://doi.org/10.1088/0953-2048/21/2/025016
2008-01-01
Abstract:A reel-to-reel system which allows simultaneous two-sided deposition of epitaxial CeO2 buffer layers on long length biaxially textured Ni-5 at.% W tape with direct current (dc) reactive magnetron sputtering is described. Deposition is accomplished through two opposite symmetrical sputtering guns with a radiation heater. Meter-long double-sided epitaxial CeO2 buffer layers have been produced for the first time on textured metal substrates in a run using a reel-to-reel process with a speed of about 1.2 m h(-1). The CeO2 films were characterized by means of x-ray diffraction (XRD) and atomic force microscopy (AFM). The samples exhibited good epitaxial growth with the c-axis perpendicular to the substrate surface for both sides. Full width at half maximum (FWHM) values of the out-of-plane and in-plane orientation for both sides were 3.2 degrees and 3.1 degrees, 5.3 degrees and 5.1 degrees, respectively. AFM observations revealed a smooth, dense and crack-free surface morphology. In addition, x-ray scans have been performed as a function of length to determine the crystallographic consistency of the epitaxial CeO2 over the length. Subsequently anyttria-stabilized zirconia (YSZ) barrier and CeO2 cap layers were deposited to complete the CeO2/YSZ/CeO2 structure via the same process. Epitaxial YBa2Cu3O7-delta (YBCO) films grown by dc sputtering on the short prototype CeO2/YSZ/CeO2/NiW conductors yielded self-field critical current densities (J(c)) as high as 1.3 MA cm(-2) at 77 K. An I-c value of 113 A cm(-1) was obtained for double-sided YBCO coated conductors.
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