Electron trapping in HfO 2 layer deposited over a HF last treated silicon substrate
L. Sambuco Salomone,M.V. Cassani,M. Garcia-Inza,S. Carbonetto,E. Redin,F. Campabadal,A. Faigón
DOI: https://doi.org/10.1016/j.mee.2024.112277
IF: 2.3
2024-10-11
Microelectronic Engineering
Abstract:Electron trapping in HfO 2 -based MOS structures was studied through pulsed capacitance-voltage (C-V) technique. 10 nm HfO 2 layer was deposited by atomic layer deposition over a HF last treated Si substrate. The C-V curves were observed to shift to positive voltages driven by the positive applied voltage along the pulses, consistent with electron trapping due to tunneling transitions between the substrate and pre-existing defects within the oxide and the subsequent lattice relaxation through electron-phonon interaction. The dependences of the voltage shift for a given capacitance value ( ΔV C ) with stress bias and time, allowed to distinguish two mechanisms. An initial trapping process occurs for times shorter than the microsecond, probably associated with a thin non-stoichiometric SiO x interfacial layer, which is followed by a trapping process that starts after tens of μs and progressively slowed down, associated with traps within the HfO 2 layer. Numerical simulations yield for the HfO 2 traps an energy of 1.3 eV below the conduction band edge, decreasing exponentially with the distance from the Si interface with a characteristic length of 1.7 nm; and phonon and relaxation energies of 50 meV and 1 eV, respectively. These physical parameters are consistent with previous reports of electron trapping in HfO 2 layers deposited on a controlled interfacial layer, suggesting that trapping properties of defects inside the HfO 2 layer are insensitive to the treatment of the Si surface before HfO 2 deposition. On the other hand, the observed large initial trapping suggests that the non-controlled SiO x interfacial region is more defective than a controlled one.
engineering, electrical & electronic,nanoscience & nanotechnology,optics,physics, applied