Amorphization In The Immiscible Cu/Ta And Cu/Nb Multilayers By Ion Beam Assisted Deposition

F Pan,F Zeng,B Zhao,J Chen
2001-01-01
Abstract:The possibility of the amorphous alloy forming in the immiscible Cu/Ta and Cu/Nb multilayers was studied by Ar+ ion beam assisted deposition (IBAD), The Ar+ ion energy used was from 2 to 10 keV It was found that the amorphous alloys were obtained in Ta-rich and Nb-rich films, and the compositions range favoring amorphization in the immiscible Cu/Ta and Cu/Nb systems is relatively narrow. Some metastable phases were also obtained in Cu-Nb and Cu-Ta systems by ion beam assisted deposition technique. The formation mechanisms of the amorphous and metastable phases are discussed both in thermodynamics and kinetics far from equilibrium.
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