Microstructures of Nb–Ti Alloy Films Prepared by Ion Beam Assisted Deposition

F Zeng,B Zhao,W Miao,F Pan
DOI: https://doi.org/10.1016/s0921-5093(03)00226-0
2003-01-01
Abstract:In Nb–Ti binary metal system with small size difference, metastable phases are prepared using ion beam assisted deposition. A Ti-rich fcc phase (fcc-I), a Nb-rich fcc phase (fcc-II) and a bcc phase are formed. The lattice constant of the fcc-I is 4.28 Å and is similar to that of the fcc-II phase. Evident texture is found in the Nb30Ti70 sample prepared using ion beam assisted deposition (IBAD) with ion energy of 2 keV. The texture mechanisms are analysed. Crystalline structure, atomic size, alloy effect, ion beam energy and kinetic model are used to analyse the formation process of the metastable phases and texture structure.
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