Influence of ion beam incident angle on microstructures and thermal stability of Co30Nb70 films

YuQing Ding,Fei Zeng,Yu Gu,KuiWei Geng,Feng Pan

2006-01-01

Abstract:Co30Nb70 films were grown by ion beam assisted deposition (IBAD) on vacuum cleaved Nad substrate. Influence of ion beam incident angle on its microstructures and thermal stability was studied with transmission electron microscopy (TEM). The results show that the ion beam incident angle significantly affects microstructures of the amorphous films. For example, at an incident angle ranging from 0°-75°, high density of pores and grooves were observed in the films after annealed at 300°C for 30 min, however, at an angle of 45°, a bcc metastable phase with strong texture shows up in the amorphous film. Moreover, annealing further at 450°C for 30 min, dissolves the bcc phase; and the samples grown at the incident angles of 15° and 75°, become partially crystallized. Possible mechanism was tentatively discussed.