Influence of Ion Incident Angle on Microstructures and Magnetic Properties of FexCr1-x Ahoy Films

Yu Gu,Fei Zeng,Kuiwei Geng,Feng Pan
DOI: https://doi.org/10.3969/j.issn.1672-7126.2006.z1.016
2006-01-01
Abstract:FexCr1-x (x = 50, 67)alloy films were grown by ion beam assisted deposition (IBAD)at various ion incident angles (0°, 15°, 30°, 45°, 60°, 75°). Among the two sets of films, (002) preferred orientation perpendicular to the film surface, and magnetic anisotropy in the film surface were obtained only at an incident angle of 45°. These microstructures and magnetic characteristics were not observed in the films prepared at other incident angles, possibly because of ion mixing and channeling effect according to the mechanism of formation of preferred orientations.
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