Effects of Skew Ion Beam Assisted Deposition on Microstructure and Magnetic Properties of Co80 Nb20 Thin Films

LI Xiao-wei,DING Yu-qing,ZENG Fei,GU Yu,GENG Kui-wei,PAN Feng
DOI: https://doi.org/10.3321/j.issn:1004-0609.2005.11.032
2005-01-01
Abstract:Co_(80)Nb_(20) thin films were prepared by skew ion beam assisted deposition(IBAD).The influence of incidence angle on microstructure,morphology and magnetic properties was investigated.The results indicate that fcc metastable phase forms in the films deposited at incidence angle smaller than 30°.After the incidence angle increases to more than 30°,the samples are turned to be hcp phase.All Co_(80)Nb_(20) samples exhibit in-plane easily magnetized character.When the incidence angle is smaller than 75°,the H_c of Co_(80)Nb_(20) thin films is comparatively smaller.When the incidence angle reaches 75°,the H_c parallel to the film surface increases significantly while the H_c perpendicular to the film surface decreases simultaneously.The results were discussed according to the influence of skew incidence angle on atomic mixing,thermal spike,internal stress and the formation of metastable structures.
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