Microstructure and Magnetic Properties of C-Axis-Oriented Mo/NdFeB/Mo Films

Wenfeng Liu,Kai Zhang,Haijie Zhang
DOI: https://doi.org/10.4028/www.scientific.net/amm.271-272.343
2012-01-01
Applied Mechanics and Materials
Abstract:Mo/NdFeB/Mo thin flms were deposited by dc-magnetron sputtering onto Si substrates, then were annealed at 650 °C for 30 min. Nanostructured Mo/NdFeB/Mo films were successfully obtained with the magnetic easy axis of NdFeB perpendicular to the film plane. It was found that the c-axis orientation depends on the NdFeB sputter power. Good c-axis orientation was obtained at 40W NdFeB sputter power. Meanwhile, Mo layer can not only induce the c-axis orientation of NdFeB, but also improve the crystallization of NdFeB grains.
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