Abstract:Amorphous alumina films are isotropic and have no grain boundaries, which make them have smooth surfaces, excellent properties, and wide applications in protective coatings, catalysis, and microelectronics. However, high-quality alumina films were usually prepared by vapor-phase approaches which need expensive equipment and long production time. Additionally, amorphous films are long-range disordered, which makes the study of structure–property relationships challenging. Here, a simple sol–gel method is employed to obtain high-quality amorphous Al2O3 thin films. The microstructure, morphology, and mechanical properties of amorphous Al2O3 thin films were systematically investigated. All the Al2O3 thin films heat-treated at 600–800∘C are in amorphous state with ultrasmooth surface (Ra values about 0.29–0.43 nm) and high mechanical properties (elastic modulus ∼170[Formula: see text]GPa, hardness ∼20[Formula: see text]GPa). The mechanical properties (E and H) of Al2O3 films gradually increase with the increase of heat-treating temperature. Additionally, the Al coordination of the amorphous alumina films are analyzed by solid-state NMR and correlated with the mechanical properties. The results show that in amorphous alumina, the presence of tetrahedral Al ([4]Al) and octahedral Al ([6]Al) is helpful to improve the mechanical properties, while the five-coordinated Al ([5]Al) is not conducive to improve the mechanical properties. The results demonstrate that sol–gel method is an attractive alternative to time-consuming and expensive vapor-phase approaches and are useful for scale-up to applications and research of amorphous alumina films.

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Optical Properties of Al 2 O 3 Thin Film Fabricated by Atomic Layer Deposition

Influence of Annealing Temperature on Microstructure and Phase Transformations of Oxide System Bi2O3/TiO2 Formed in Aqueous Solutions

Molecular Dynamics Study of Substrate Temperature and Incident Energy Influence on the Crystallization Behavior of Alumina Thin Film Deposition Process

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Synthesis and structural characterization of alumina nanoparticles

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Influence of ion beam incident angle on microstructures and thermal stability of Co30Nb70 films

The structure and phase transformations in fumed transition alumina by X-ray diffraction and solid-state NMR

On the influence of annealing on the compositional and crystallographic properties of sputtered Li-Al-O thin films

Low-Temperature Crystallization and Hardness Enhancement of Alumina Films Using the Resputtering Technique

Study of phase transformation and surface microstructure of alumina ceramic under irradiation of intense pulsed ion beam

Comprehensive microstructural and optical characterization of the thermal stability of aluminum-titanium oxynitride thin films after high temperature annealing in air

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[Study of Nanostructures and Reflective Spectra of Porous Alumina Films].