Amorphization and Phase Evolution in Fe–Nb Films Prepared by Ion Beam Assisted Deposition

F Zeng,B Zhao,F Pan
DOI: https://doi.org/10.1016/s0040-6090(02)00534-5
IF: 2.1
2002-01-01
Thin Solid Films
Abstract:The ion beam assisted deposition (IBAD) technique is utilized to study amorphization in Fe–Nb binary metal systems. The amorphous range covers a Nb fraction of approximately 34–60 at.%. The Fe-rich and Nb-rich supersaturated solid solutions of the bcc phase were obtained in Fe66Nb34 and Fe31Nb69 films, respectively. In the Fe66Nb34 films, the ‘amorphous→amorphous+bcc→bcc’ evolution with increased ion beam energy from 2 to 8 keV is observed accompanying changes of film morphology. The phase formation in the IBAD process is determined by both thermodynamic and kinetic factors.
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